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Wear-resistant and corrosion-resistant protecting film and preparation method and application thereof

A protective film and corrosion-resistant technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of chemically unstable precursors, increase the difficulty of preparation process control, and affect the performance of the film. , to achieve the effect of improving protective performance and strong interface bonding force

Active Publication Date: 2020-08-07
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Preparation of TaO by Vapor Deposition 2 Thin films require the introduction and regulation of oxygen pressure. Since Ta has a variety of oxidation valence states, the gas composition and pressure ratio in the vacuum deposition chamber will significantly affect the 2 Chemical composition and microstructure of the film, as-prepared TaO 2 Thin films are often doped with Ta 2 o 3 、 Ta 2 o 5 and other valence oxides, thus ultimately affecting the prepared TaO 2 The performance of the film
Preparation of TaO by Sol-Gel Method 2 For thin films, chemically unstable precursors need to be used, which significantly increases the difficulty of preparation process control

Method used

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  • Wear-resistant and corrosion-resistant protecting film and preparation method and application thereof
  • Wear-resistant and corrosion-resistant protecting film and preparation method and application thereof
  • Wear-resistant and corrosion-resistant protecting film and preparation method and application thereof

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preparation example Construction

[0027] The present invention provides a preparation method of the wear-resistant and corrosion-resistant protective film described in the above technical solution, comprising the following steps:

[0028] (1) Deposit metal Ta on the surface of the substrate by ion plating to form a thin film of metal Ta on the surface of the substrate;

[0029] (2) irradiating the metal Ta thin film with an atomic oxygen beam to form a wear-resistant and corrosion-resistant protective film in situ on the surface of the substrate; the energy of the atomic oxygen beam is 0.1-2eV, and the irradiation time is 30-120min.

[0030] The invention adopts the ion plating method to deposit metal Ta on the surface of the substrate, and forms a metal Ta film on the surface of the substrate.

[0031] In the present invention, the substrate is preferably pretreated before depositing metal Ta. In the present invention, the substrate preferably includes at least one of TA1 titanium alloy, TA2 titanium alloy, ...

Embodiment 1

[0043] The instruments used include: ABS-1200 type multi-arc combined with unbalanced magnetron sputtering coating device; Simul-LEO-T 450 type space atomic oxygen effect ground simulation test device; the substrate is made of TC4 titanium alloy, and its geometric dimensions are:

[0044] (1) Surface polishing and cleaning of substrate

[0045] Use water sandpaper to grind and polish the surface of the substrate, so that the surface roughness of the substrate to be coated is better than 0.08 μm; then, use acetone, petroleum ether and absolute ethanol to clean the surface and polish the substrate sequentially; finally rinse with deionized water and quickly use nitrogen gas blow dry.

[0046] (2) Substrate installation and argon ion sputtering cleaning

[0047] Put the substrate sample cleaned in the previous step into the ABS-1200 multi-arc combined unbalanced magnetron sputtering coating device, so that the distance between the center of the substrate and the center of the ...

Embodiment 2

[0053] The instruments used include: ABS-1200 type multi-arc combined with unbalanced magnetron sputtering coating device; Simul-LEO-T 450 type space atomic oxygen effect ground simulation test device; the substrate is made of TC4 titanium alloy, and its geometric dimensions are:

[0054] (1) Surface polishing and cleaning of substrate

[0055] Use water sandpaper to grind and polish the surface of the substrate, so that the surface roughness of the substrate to be coated is better than 0.08 μm; then, use acetone, petroleum ether and absolute ethanol to clean the surface and polish the substrate sequentially; finally rinse with deionized water and quickly use nitrogen gas blow dry.

[0056] (2) Substrate installation and argon ion sputtering cleaning

[0057] Put the substrate sample cleaned in the previous step into the ABS-1200 multi-arc combined unbalanced magnetron sputtering coating device, so that the distance between the center of the substrate and the center of the ...

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Abstract

The invention provides a wear-resistant and corrosion-resistant protecting film and a preparation method and application thereof and belongs to the field of protecting materials. The wear-resistant and corrosion-resistant protecting film has a multilayered structure which successively comprises a metal Ta layer, a metal Ta and TaO2 mixed transitional layer and a TaO2 layer from the surface of a matrix and the surface of the film. The preparation method of the wear-resistant and corrosion-resistant protecting film comprises the following steps of depositing the metal Ta on the surface of the matrix by adopting an ion plating method to form a metal Ta film on the surface of the matrix; and irradiating the metal Ta film by adopting an atomic oxygen beam to form the wear-resistant and corrosion-resistant protecting film on the surface of the matrix, wherein energy of the atomic oxygen beam is 0.1-2 eV and the irradiation time is 30-120 min. The preparation method provided by the inventionis simple and easy to operate, and the prepared wear-resistant and corrosion-resistant protecting film has relatively good protecting performance to a titanium-based material.

Description

technical field [0001] The invention relates to the field of film materials, in particular to a wear-resistant and corrosion-resistant protective film, a preparation method and application thereof. Background technique [0002] As we all know, titanium and titanium alloys have good mechanical properties and biocompatibility, so they are widely used as prosthetic materials for human implantation. However, it has been found that the matrix implanted in the human body still undergoes slight corrosion, and the slight reaction between the matrix and human tissue fluid may affect its fatigue life and material strength. On the other hand, the friction between the matrix implanted in the human body and the human bone will cause slight abrasion of such materials and form metal wear debris, which will trigger an inflammatory response. Therefore, when titanium and titanium alloys are used as human implant materials, it is necessary to further strengthen their surface wear resistance a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/02C23C14/08C23C14/16C23C14/54C23C14/58
CPCC23C14/021C23C14/022C23C14/028C23C14/083C23C14/16C23C14/32C23C14/542C23C14/5853
Inventor 胡明姜栋王琴琴王德生伏彦龙杨军高晓明翁立军
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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