A method for preparing graphene single crystal wafer on copper-based textured film substrate

A technology of graphene and single crystal, which is applied in the field of preparing graphene single crystal wafers on copper-based textured film substrates, can solve the problems of high cost, achieve the effects of reducing production costs, achieving wide application, and consistent orientation
CN111705359BActive Publication Date: 2022-07-05SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2022-07-05

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Abstract

The present invention provides a method for preparing a graphene single crystal wafer on a copper-based textured film substrate, comprising the following steps: S1: providing a copper-based textured film substrate, and applying the copper-based textured film substrate to the Putting in a chemical vapor deposition system for annealing treatment; and S2: feeding a gaseous carbon source to epitaxially grow a graphene single crystal wafer on the surface of the copper-based textured film substrate. According to a method for preparing a graphene single crystal wafer on a copper-based textured film substrate provided by the present invention, the problem of high cost caused by epitaxial growth of a single crystal graphene wafer on a single crystal substrate is solved, which is beneficial to graphene The large-scale application of single crystal wafers is of great significance to the realization of the wide application of graphene in the field of microelectronics.
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Description

technical field

[0001] The invention belongs to the field of material preparation, and more particularly relates to a method for preparing a graphene single crystal wafer on a copper-based textured film substrate. Background technique

[0002] Graphene has excellent optoelectronic properties and shows great application potential in various fields, which has attracted wide attention from all walks of life. Among the many applications of graphene, the most attractive one is in the field of microelectronics. Graphene as a channel material is an important candidate material to replace existing silicon materials due to its ultra-high carrier mobility and is expected to continue Moore's Law. Among them, the batch preparation of graphene single crystal wafers is the premise for its large-scale application in the field of microelectronics in the future. The preparation of existing graphene single crystal wafers mainly uses metal single crystals or germanium single crystals as subs...

Claims

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