Composite slurry for doping in semiconductor industry and curing film-forming processing method

Abstract

The invention discloses composite slurry for doping in the semiconductor industry and a curing film-forming processing method. The invention belongs to the field of high polymer materials, and particularly relates to composite slurry for doping in the semiconductor industry and a subsequent curing molding manufacturing method. According to the curing film-forming processing method of composite slurry for doping in the semiconductor industry, the composite slurry for doping is used for processing the composite slurry for doping by adopting wet papermaking equipment, and the composite slurry ischaracterized in that the composite slurry for doping is washed by deionized water or ultrapure water before being put into the wet papermaking equipment. The composite slurry and the forming film thereof are moderate in hardness, moderate in strength and uniform and consistent in doping, and the strict index requirement that the product yield is larger than 99.999% is met when parallel contrast tests are conducted on famous semiconductor manufacturers and imported products in China. The composite slurry has positive significance for realizing import substitution of the product and getting ridof dependence on foreign imported products.

Description

technical field [0001] The invention belongs to the field of macromolecular materials, and in particular relates to a composite slurry for doping in the semiconductor industry and a subsequent solidification molding manufacturing method. Background technique [0002] Doping (diffusion process) in the existing semiconductor industry mainly uses composite slurry and subsequent curing forming film products, which are niche products and have an extremely narrow application range. The national saturated market share is only tens of millions of RMB. At the same time, it belongs to high-end electronic chemicals, which has disadvantages such as high entry threshold, long certification cycle, and high compensation costs for quality problems. Therefore, it is rare to invest large-scale funds in this field for R & D and production, so this product has been monopolized by foreign companies for a long time. At present, FILMTRONICS products imported from the United States are on the dome...

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Problems solved by technology

At present, this patent represents the domestic level of the doped membrane product industry. According to this process, the finished membrane can be produced, but there are problems such as cumbersome process, serious waste of solvent, and serious environmental pollution, especially in today's environmental protection. A large amount of VOC is discharged into the atmosphere. Even after waste gas treatment, a large amount of solvents will inevitably escape and enter the atmosphere, causing economic and environmental losses.

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