Texturing additive capable of regulating and controlling hydrophilicity and hydrophobicity of silicon wafer and texturing method

Abstract

The invention relates to the technical field of monocrystalline silicon wafer texturing agents, in particular to a texturing additive capable of regulating and controlling hydrophilicity and hydrophobicity of a silicon wafer and a texturing method. A texturing additive capable of regulating and controlling hydrophilicity and hydrophobicity of a silicon wafer comprises a hydrophilic formula and a hydrophobic formula, wherein the hydrophilic formula comprises the following components in percentage by weight: 0.05-0.1% of sodium lignin sulfonate, 0.0001-0.001% of sodium methylene bis-naphthalenesulfonate and the balance of water; the hydrophobic formula comprises the following components in percentage by weight: 0.05%-0.1% of sodium lignin sulfonate, 0.0001%-0.001% of sodium methylene bis-naphthalene sulfonate, 0.03-0.1% of polyethylene glycol monomethyl ether, and the balance of water. According to the texturing additive and the texturing method, the hydrophilicity and hydrophobicity ofthe silicon wafer can be effectively regulated and controlled as required, the textured silicon wafer can reach a hydrophobic state after being subjected to hydrofluoric acid pickling only by additionally adding polyethylene glycol monomethyl ether into a hydrophilic formula, the operation process is simple, the conversion of the hydrophilicity and hydrophobicity can be simply and conveniently realized, and different processing requirements are met.

Description

technical field [0001] The invention relates to the technical field of monocrystalline silicon wafer texturing agents, in particular to a texturing additive and a texturing method capable of regulating the hydrophilicity and hydrophobicity of silicon wafers. Background technique [0002] In nature, the content of silicon in the earth's crust is second only to oxygen, and it generally exists in the form of silicon dioxide or silicate; for elemental silicon, its chemical properties are not active, and at room temperature, except for reaction with F2 and HF strong alkali In addition, it does not react with other substances and is a good semiconductor material. [0003] With the rapid development of microelectronics technology, semiconductor silicon materials have been rapidly developed in the energy field due to their abundant resources and excellent characteristics. Texturing is an important process in the production of solar cells. Using the principle of anisotropic corrosio...

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Problems solved by technology

[0005] The present invention aims at the shortcoming that the texturing liquid in the prior art cannot handle the hydrophilicity and hydrophobicity of silicon wafers according to the needs of processing and manufacturing, and provides a texturing additive and a texturing method that can regulate the hydrophilicity and hydrophobicity of silicon wafers. It is only necessary to add polyglycol methyl ether to the formula, so that the silicon wafer after texturing can reach a hydrophobic state after being pickled with hydrofluoric acid, and the hydrophilicity and hydrophobicity of the silicon wafer can be easily adjusted

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