Electrochemical recycling method for indium gallium zinc oxide target material

An indium gallium zinc oxide and electrochemical technology, applied in the field of electrochemical metallurgy, can solve the problems of environmental hazards and cumbersome recycling process, and achieve the effect of avoiding separation steps, simple process flow and uniform distribution

Pending Publication Date: 2020-11-24
ZHENGZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The recycling process is cumbersome and harmful to the environment

Method used

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  • Electrochemical recycling method for indium gallium zinc oxide target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] figure 1 It is a scanning electron microscope image of the indium gallium zinc oxide composite powder disclosed in Example 1. Electrochemical methods for recycling InGaZn targets include:

[0057] CaCl 2 Put the corundum crucible, put the crucible into a vacuum heating box, set the vacuum degree to 100Pa, and keep it at 300°C for 24h;

[0058] Electrolyte CaCl after drying 2 Put it into a high-temperature electrolytic furnace, use the discarded indium gallium zinc oxide as the cathode, and the graphite rod as the anode, and connect the electrolysis power supply;

[0059] Adjust the argon flow rate to 20ml / min, and the heating temperature to 850°C;

[0060] Heat the electrolyte to a molten state, set the voltage to 2.7V for constant potential electrolysis, and obtain an indium-gallium-zinc alloy;

[0061] Prepare NH with a concentration of 1mol / L 4 Cl aqueous solution;

[0062] With the obtained indium gallium zinc alloy as the anode and graphite as the cathode, c...

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Abstract

The invention relates to an electrochemical recycling method for an indium gallium zinc oxide target material. The method comprises the following steps of (1) a constant potential electrolytic process: performing constant potential electrolysis under protection of inert gas to obtain an indium gallium zinc alloy by taking indium gallium zinc oxide as a raw material, a fused salt comprising calciumchloride as an electrolyte, a first graphite electrode as a first cathode and a second graphite electrode as a first anode; (2) a constant current electrolytic process: performing constant current electrolysis to obtain an indium gallium zinc hydroxide precipitate by taking the indium gallium zinc alloy as a second cathode and an ammonium chloride aqueous solution as an electrolytic solution; and(3) a calcining process: calcining the indium gallium zinc hydroxide precipitate to obtain nanoscale indium gallium zinc oxide composite powder.

Description

technical field [0001] The application belongs to the technical field of electrochemical metallurgy, and in particular relates to an electrochemical preparation method of indium gallium zinc oxide composite powder. Background technique [0002] Indium gallium zinc oxide (IGZO, InGaZnO4) has excellent surface uniformity, stability and optical transparency, and has a wide range of applications in the field of electronic and optoelectronic devices. The indium and gallium required for the preparation of IGZO are scattered metals with little crustal content and expensive prices. With the increasing use of IGZO, more and more problems are caused, the impact on the environment after discarding is irreversible, and it causes a huge waste of resources. [0003] At present, the conventional recovery method of waste IGZO is acid leaching-extraction or thermal reduction-distillation to obtain various metal oxides or simple substances, and then acidolysis, co-precipitation or hydrotherm...

Claims

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Application Information

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IPC IPC(8): C25C3/36C25B1/00C01G15/00B82Y40/00
CPCB82Y40/00C01G15/00C01P2004/03C01P2004/64C25B1/00C25C3/36
Inventor 宋建勋李少龙车玉思舒永春何季麟
Owner ZHENGZHOU UNIV
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