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A f-β-ga2o3/cugao2 ultraviolet photodetector and its preparation method

An electric detector, -ga2o3 technology, applied in the field of F-β-Ga2O3/CuGaO2 ultraviolet photodetector and its preparation, can solve the problems of slow response speed, low responsivity, and low photosensitivity, so as to promote separation and improve Contact area, the effect of increasing the optical bandgap

Active Publication Date: 2022-05-20
河北光森电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the technical defects of low photosensitivity, low responsivity and slow response speed of existing ultraviolet photodetectors, the present invention provides a F-β-Ga 2 o 3 / CuGaO 2 Ultraviolet photodetector and its preparation method

Method used

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  • A f-β-ga2o3/cugao2 ultraviolet photodetector and its preparation method
  • A f-β-ga2o3/cugao2 ultraviolet photodetector and its preparation method
  • A f-β-ga2o3/cugao2 ultraviolet photodetector and its preparation method

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Embodiment 1

[0027] Step 1: Add 3.99g of copper acetate and 5.1g of gallium nitrate into 49.9ml of deionized water successively, and then slowly drop 63.8ml of NaOH solution into the solution after ultrasonication at room temperature for 15min, and stir in a water bath at 60°C for 20min, then Add 15ml of ethylene glycol solution dropwise to the mixed solution and continue to stir at the same temperature for 12min, then let it stand for 1h. The product was centrifuged and washed with nitric acid until the washing liquid was neutral, and then washed alternately with absolute ethanol and deionized water for 4 times, and then the product was dried in a vacuum oven at 65°C to obtain CuGaO 2 Nanosheets.

[0028] Step 2: Add 3.3g of CuGaO 2 Nanosheets and 3.69g of gallium nitrate were added to 36.9ml of deionized water, ultrasonicated for 20min, then NaOH solution was slowly dropped into the solution at room temperature to adjust the pH value of the solution to about 9, and then 15.8ml of NaF so...

Embodiment 2

[0032] Step 1: Add 7g of copper acetate and 7.2g of gallium nitrate to 87.5ml of deionized water successively. After ultrasonication for 20min at room temperature, slowly drop 84ml of NaOH solution into the solution, stir in a water bath at 50°C for 30min, and then add Add 20ml of ethylene glycol solution dropwise into the solution and continue to stir at the same temperature for 13 minutes, then let it stand for 2 hours. After standing, put the solution in the inner lining of the reaction kettle and react for 36 hours at 210°C. After cooling naturally to room temperature, dilute it with dilute nitric acid. The product was washed by centrifugation until the washing liquid was neutral, and then alternately washed four times with absolute ethanol and deionized water, and then the product was dried in a vacuum oven at 66°C to obtain CuGaO 2 Nanosheets.

[0033] Step 2: Add 5.78g of CuGaO 2 Nanosheets and 4.39g of gallium nitrate were added to 43.9ml of deionized water, ultrasoni...

Embodiment 3

[0037] Step 1: Add 5.24g of copper acetate and 5.76g of gallium nitrate into 65.5ml of deionized water successively, and then slowly drop 68.2ml of NaOH solution into the solution after ultrasonication at room temperature for 18min, and stir in a water bath at 53°C for 28min, then Add 16ml of ethylene glycol solution dropwise to the mixed solution and continue to stir at the same temperature for 10 minutes, then let it stand for 2 hours. The product was centrifuged and washed with nitric acid until the washing liquid was neutral, and then washed alternately with absolute ethanol and deionized water for 4 times, and then the product was dried in a vacuum oven at 69°C to obtain CuGaO 2 Nanosheets.

[0038] Step 2: Add 4.33g of CuGaO 2 Nanosheets and 3.46g of gallium nitrate were added to 34.6ml of deionized water, ultrasonicated for 23min, then NaOH solution was slowly dropped into the solution at room temperature to adjust the pH value of the solution to about 9, and then 12.1...

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Abstract

The invention belongs to the technical field of photodetectors, in particular to a F-β-Ga 2 o 3 / CuGaO 2 An ultraviolet photodetector and a preparation method thereof, the preparation method comprising: first reacting copper acetate, gallium nitrate and NaOH to prepare CuGaO 2 The nanosheets were then prepared with gallium nitrate as the Ga source and supplemented with NaF, respectively, loaded on CuGaO 2 F‑β‑Ga on Nanosheets 2 o 3 / CuGaO 2 and pure F‑β‑Ga 2 o 3 ; Then two sheets of material are coated successively on the interdigitated electrode and prepared Au electrode on the thin film by thermal evaporation to obtain F‑β‑Ga 2 o 3 / CuGaO 2 UV photodetector. The ultraviolet photodetector of the present invention has high photosensitivity and responsivity, and the detector responds quickly.

Description

technical field [0001] The invention belongs to the technical field of photodetectors, in particular to a F-β-Ga 2 o 3 / CuGaO 2 Ultraviolet photodetectors and methods of making them. Background technique [0002] Sunlight can be divided into three bands, ultraviolet region, visible region, and infrared region; the wavelength band less than 400nm is the ultraviolet band. In addition to aerospace and military fields, such as radiation detection in space, there are certain requirements for ultraviolet detection technology; in the civilian field, because ultraviolet radiation will affect vitamin synthesis in the human body, ultraviolet radiation, etc. There are certain needs. [0003] The photodetector is an important optoelectronic device that realizes the perception and detection through the transformation of the photoelectric signal. The photodetection mainly completes the detection through the following steps: first, the detector generates photogenerated carriers under t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/032H01L31/109H01L31/18G01J1/42
CPCH01L31/032H01L31/0321H01L31/109H01L31/18G01J1/429Y02P70/50
Inventor 冯云龙
Owner 河北光森电子科技有限公司
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