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Method for plating surface layer of diamond powder with non-magnetic metal

A diamond powder and non-magnetic metal technology, applied in the field of materials, can solve problems such as difficult uniform coating and inability to accurately control the thickness of the film layer, and achieve the effect of high film purity, less pores and uniform film layer

Pending Publication Date: 2021-01-08
DONGGUAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when magnetron sputtering is used to coat thinner films, it is still impossible to accurately control the thickness of the film, and it is also difficult to achieve uniform coating.

Method used

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  • Method for plating surface layer of diamond powder with non-magnetic metal
  • Method for plating surface layer of diamond powder with non-magnetic metal
  • Method for plating surface layer of diamond powder with non-magnetic metal

Examples

Experimental program
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Effect test

Embodiment 1

[0029] A method for coating non-magnetic metal on the surface of diamond powder, the specific operation is as follows: a micro-powder magnetron coating system is used, a 3-inch Mo target is installed with a permanent magnet target head, a DC power supply is turned on, the diamond powder is placed in a coating chamber, and the The coating chamber is evacuated to 3.2×10 -4 Pa, clean the diamond with a 100kV ion source for 30 minutes; then set the parameters of the magnetron sputtering method as follows: the working atmosphere is Ar, the flow rate of Ar is 20sccm, and the working pressure is 3.2×10 -4 Pa, the power of magnetron sputtering is 200W, the current of magnetron sputtering is 595mA, the voltage of magnetron sputtering is 336V; the time of sputtering is 30min, and the temperature of vacuum chamber heating is 25°C. The film is coated until the thickness of the coating is 0.04-0.06 μm, and the diamond powder material with molybdenum coating on the surface is prepared.

[...

Embodiment 2

[0032] A method for coating non-magnetic metal on the surface of diamond powder, the specific operation is as follows: a micro-powder magnetron coating system is used, a 3-inch Mo target is installed with a permanent magnet target head, a DC power supply is turned on, the diamond powder is placed in a coating chamber, and the The coating chamber is evacuated to 7.2×10 -4 Pa, clean the diamond with a 100kV ion source for 30 minutes; then set the parameters of the magnetron sputtering method as follows: the working atmosphere is Ar, the flow rate of Ar is 20sccm, and the working pressure is 7.2×10 -4 Pa, the power of magnetron sputtering is 200W, the current of magnetron sputtering is 634mA, the voltage of magnetron sputtering is 318V; the time of sputtering is 50min, and the temperature of vacuum chamber heating is 30°C. The film is coated until the thickness of the coating is 0.04-0.06 μm, and the diamond powder material with molybdenum coating on the surface is prepared.

[...

Embodiment 3

[0035] A method for coating non-magnetic metal on the surface of diamond powder, the specific operation is as follows: a micro-powder magnetron coating system is used, a 3-inch Mo target is installed with a permanent magnet target head, a DC power supply is turned on, the diamond powder is placed in a coating chamber, and the The coating chamber is evacuated to 5.2×10 -4 Pa, clean the diamond with a 150kV ion source for 30 minutes; then set the parameters of the magnetron sputtering method as follows: the working atmosphere is Ar, the flow rate of Ar is 20sccm, and the working pressure is 5.2×10 -4 Pa, the power of magnetron sputtering is 200W, the current of magnetron sputtering is 633mA, the voltage of magnetron sputtering is 315V; the time of sputtering is 70min, and the temperature of vacuum chamber heating is 30°C. The film is coated until the thickness of the coating is 0.04-0.06 μm, and the diamond powder material with molybdenum coating on the surface is prepared.

[...

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Abstract

The invention belongs to the field of materials, and discloses a method for plating a surface layer of diamond powder with non-magnetic metal. The method comprises the following steps that (1) the diamond powder is cleaned; and (2) sputtering is carried out on the surface layer of the diamond powder with the non-magnetic metal by adopting a magnetron sputtering method, and the surface layer of thediamond powder is plated with a film layer, wherein the specific parameters of the magnetron sputtering method in the step (2) are as follows: the working atmosphere is Ar, the flow rate of the Ar is10-30 sccm, the working air pressure is 3*10<-4>-1*10<-3> Pa, the magnetron sputtering power is 100-300 W, and the magnetron sputtering voltage is 300-400 V, the sputtering time is 20-100 minutes, and the heating temperature of a vacuum chamber is 25-30 DEG C. According to the method, by adopting a magnetron sputtering mode, metal with different melting points, such as titanium, aluminum, molybdenum and tungsten, can be deposited; the thickness of the thin film can be accurately controlled, and the film layer is uniform. and meanwhile, a plating layer and a substrate are good in binding force, the density is high, pores are few, and the purity of the film layer is high.

Description

technical field [0001] The invention belongs to the field of materials, in particular to a method for coating non-magnetic metal on the surface of diamond powder. Background technique [0002] Diamond is widely used in various fields because of its excellent physical properties. Plating non-magnetic metals on the surface of diamond powder can further improve the performance of diamond, forming alloy reinforcements, abrasive grains, surface materials or electronic component materials, etc., which is of great significance in the field of materials. [0003] There are many techniques for coating non-magnetic metals on the surface of diamonds. In addition to traditional electroplating methods, there are also chemical vapor deposition, salt bath coating methods, covering combustion coating methods, vacuum micro-evaporation coatings, etc. Among them, the operation of electroplating or electroless plating is highly technical, and the ratio of the solution must be precisely control...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/18
CPCC23C14/35C23C14/185C23C14/223
Inventor 李文芳祝闻王康
Owner DONGGUAN UNIV OF TECH
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