ZnS substrate-based multiband salt spray-resistant antireflection film and preparation method thereof

Abstract

The invention discloses a preparation method of a ZnS substrate-based multiband salt spray resistant antireflection film, and belongs to the technical field of optical films. The design theory of a multilayer antireflection film stretching across visible light, near-infrared light and medium-wave infrared bands is utilized, the design theory of the multilayer antireflection film on a high-refractive-index substrate is combined, a matching layer design for enhancing binding force is inserted, and refractive index matching with the substrate is achieved through an asymmetric equivalent layer andan asymmetric equivalent layer by adopting an asymmetric lambda / 4 film system. High-density oxygen ions emitted by an ion source are utilized to further oxidize the film, and meanwhile, high-energy argon ions and oxygen ions are utilized to pretreat the substrate. On one hand, the mechanism characteristics at the interface of the substrate and a film layer are improved, so that the bonding forcebetween the substrate and TiO2 is increased by a bonding layer; and on the other hand, the nodule defect with poor adhesive force generated in the coating process can be effectively removed before growth, the film layer is more compact, and meanwhile, the stress influence between the TiO2 and SiO2 is reduced, and the firmness, the damp and heat resistance and the salt mist resistance of the film layer are improved.

Description

technical field [0001] The invention relates to the technical field of optical thin films, in particular to a ZnS substrate-based multi-band salt fog resistant anti-reflection film and a preparation method thereof. Background technique [0002] With the development of optical instruments, the requirements for the environmental resistance of multi-band optical coating components are getting higher and higher, such as front windows or fairings in airborne, ship-borne and vehicle-mounted multispectral imaging systems. On the one hand, it is required that the coated components can withstand the test of harsh environments, and on the other hand, it is also required to keep their optical performance from degrading. As an important optical element in the optical system, CVD-ZnS windows have good mechanical properties and theoretically good optical properties, and are widely used in multi-spectral and wide-spectrum common-window imaging instruments and optoelectronic weapon systems....

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Problems solved by technology

It is plated by vacuum evaporation by combining hard oxide, soft sulfide and fluoride film materials, such as: Y 2 o 3 Primer, combined with ZnS and YbF 3 The design of the anti-reflection coating in the visible, near-infrared, and mid-infrared bands, and the parts prepared with the aid of electron beam evaporation and ion beams, through engineering tests, it was found that the anti-reflection coating layer combined with zinc sulfide, zinc selenide, and chalcogenide glass substrates , the test results of damp heat and salt spray are not very good, especially the outermost layer has poor adaptability to the environment for a long time

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