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A silicon nanowire-based gas sensor element and its preparation method and application in detecting acetone

A gas sensor, silicon nanowire technology, applied in chemical instruments and methods, nanotechnology, nanotechnology and other directions, can solve the problems of infection with other diseases, patient discomfort, diabetes and other problems, and achieve simple preparation process, high process repeatability, low cost effect

Active Publication Date: 2021-12-21
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current clinical detection of diabetes mostly uses various invasive methods, but invasive methods are likely to cause discomfort to patients and the risk of infection of other diseases, and usually require specialized instruments and laboratory personnel, resulting in the detection of diabetes by invasive methods is not only expensive but also unfavorable Timely Diagnosis and Confirmation of Early Patients

Method used

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  • A silicon nanowire-based gas sensor element and its preparation method and application in detecting acetone
  • A silicon nanowire-based gas sensor element and its preparation method and application in detecting acetone
  • A silicon nanowire-based gas sensor element and its preparation method and application in detecting acetone

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] (1) Cleaning of single crystal P-type silicon wafer

[0040] Soak a silicon wafer with a size of 2*2cm in a mixed solution of concentrated sulfuric acid and hydrogen peroxide with a volume ratio of 3:1 for 40 minutes to remove metal impurities on the surface, and then soak it in a HF solution and deionized water with a volume ratio of 1:1 for 10 minutes Remove SiO formed on the surface 2 , and finally ultrasonically cleaned in acetone solvent, absolute ethanol, and deionized water for 10 minutes, respectively, to remove surface oil and organic impurities, and placed in a vacuum drying oven for thorough drying.

[0041] (2) Configure chemical etching solution

[0042] Take 1M hydrofluoric acid in a polytetrafluoroethylene beaker and let it stand for use.

[0043] Take hydrofluoric acid (uniformly dispersed in water) in a polytetrafluoroethylene beaker, weigh the AgNO 3 And dissolved in the above hydrofluoric acid, let it stand for 5min, so that AgNO 3 Fully dissolve...

Embodiment 2

[0054] The difference between this example and Example 1 is that in step (5), the dried Ag nanoparticle-modified nanowires were placed in a 20% volume fraction of APTES ethanol solution and heated in a water bath at 60° C. for 15 minutes.

Embodiment 3

[0056] The difference between this example and Example 1 is that in step (5), the dried Ag nanoparticle-modified nanowires were placed in a 10% volume fraction of APTES ethanol solution and heated in a water bath at 70° C. for 30 minutes.

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Abstract

The invention discloses a silicon nanowire-based gas sensor element, its preparation method and its application in the detection of acetone. The nano-Ag and APTES double modification structure is introduced on the surface of the silicon nanowire, that is, the process of forming the silicon nanowire by chemical etching The metal Ag by-products generated in the reaction can realize the modification of silicon nanowires. APTES interacts with silicon nanowires in ethanol solution, and the effective attachment of the amino functional groups of APTES is formed on the surface of nanowires, thereby greatly enhancing the strength of silicon nanowires. The surface adsorption ability of organic acetone molecules significantly improves and improves the sensitivity response of silicon nanowire sensors to acetone. The element of the invention can accurately identify 1ppm and 2ppm acetone at room temperature and relative humidity of 80%, and is expected to be applied to the detection and diagnosis of early diabetes.

Description

technical field [0001] The invention belongs to the technical field of gas detection, and more specifically discloses an ordered porous silicon nanowire-based gas sensor element based on double modification of nano silver (Ag) and 3-aminopropyltriethoxysilane (APTES) , the sensor element has high sensitivity and ultrafast response characteristics to acetone gas at room temperature and high humidity. Background technique [0002] With the continuous development of the global economy, people's living standards continue to improve. However, an unexpected disease is sweeping the globe, especially in developed countries - diabetes. Diabetes is a chronic long-term disease that brings endless suffering to patients. Medical analysis points out that diabetes can be divided into three categories, 5-10% of patients suffer from type 1 diabetes, 90-95% of patients suffer from type 2 diabetes and gestational diabetes mellitus (GDM). In 2014, 442 million adults worldwide had diabetes. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12C30B33/10C30B29/06C23C14/35C23C14/16B82Y15/00
CPCG01N27/127C30B33/10C30B29/06C23C14/35C23C14/165B82Y15/00
Inventor 秦玉香藏俊生闻棕择
Owner TIANJIN UNIV
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