Diamond film based on nanoparticle modification and preparation method thereof

Abstract

The invention discloses a diamond film based on nanoparticle modification and a preparation method thereof. According to the diamond film based on nanoparticle modification, a silicon-based material, a metal material or a composite material is taken as a substrate, and metal Ni is sputtered on the upper surface of the substrate to serve as a transition layer; the flow of hydrogen, argon and methane gas, the gas pressure, the substrate temperature and the deposition time are reasonably optimized on the surface of the transition layer through a chemical vapor deposition method, so that the adhesive force on the film substrate is enhanced; and finally, the surface of the prepared diamond film is subjected to chemical corrosion, and coated with nano titanium dioxide particles so that the hydrophobic property and the self-cleaning property of the surface of the diamond film can be improved. The prepared diamond film can be widely applied to the fields of machinery, tools and molds, cutters, automobiles, electronics, optics, and decorative appearance protection, such as watch shells, jewelry accessories and mobile phone shells.

Description

Technical field

[0001] The present invention relates to the technical field of diamond film, and is specifically a diamond film based on nanoparticle modification and a preparation method thereof.Background technique

[0002] The diamond film has excellent polishing performance, and the nano diamond film has a more smooth surface and lower friction coefficient, and the friction coefficient can be less than 0.05. The micro-hardness measured by the nano-mechanical probe is as high as 8000kg / mm2, almost called " Never wear ", thus nano diamond film in electrical, friction wear, micro-electromechanical system, field emission, optical, electrical, electrical, thermal and optical, etc., such as having the largest Young Modul, the highest thermal conductivity, the highest disable bandwidth, the lowest dielectric constant, etc. These excellent physical chemical properties have made diamonds have broad application prospects in high-tech fields.

[0003] At present, the process of preparing a diamond...