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Diamond film based on nanoparticle modification and preparation method thereof

A diamond film and nanoparticle technology, which is applied in the field of nanoparticle-based diamond film and its preparation, can solve the problems of poor bonding and adhesion, and low bonding between the diamond film and the substrate.

Inactive Publication Date: 2021-04-13
SHANGHAI ZHENGSHI TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The bonding force between the diamond film prepared by vapor deposition method and the substrate is low, which has always been a bottleneck limiting the application of diamond film
In order to solve the problem of poor bonding and adhesion between the diamond film and the substrate, the present invention provides a diamond film based on nanoparticle modification and its preparation method, so that the diamond film can be used more and more widely

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033](1) Diamond microfourly: The diamond fine powder is added to a mass concentration of 25% ammonia, ultrasonic oscillating, deposition for 1 h, anhydrous ethanol solution, dried under temperature of 55 ° C, to obtain a surface aminocarbon micropowder; The surface aminocylated diamond fine powder was dissolved in silver plating solution, stirred, and the temperature was 45 ° C, and the reaction was 15 min, the sulfate, stirring, stirred, 5 min, filtered, absolute ethanol, drying, temperature of 55 ° C Dry, add acetone solution, formulated into a degree of diamond microprophetone acetone having a mass concentration of 10%;

[0034](2) Base treatment: After polishing the surface of the copper foil substrate, the ultrasound washed 10 min in acetone solution, and then washed at 5 min, and then soaked in a dilute acid solution of 10% in a concentration of 6 h, and finally used Deion water cleaning;

[0035](3) Preparation of a transition layer: Sputtering metal Ni is formed by sputtering me...

Embodiment 2

[0040](1) Diamond microfourly: adding an ammonia water having a mass concentration of 25% to a diamond micropowder, an ultrasonic oscillating, sealing 1.5H, anhydrous ethanol solution, dried under temperature of 57 ° C to obtain a surface aminocarbon micropowder The surface aminocylated diamond fine powder was dissolved in silver plating solution, stirred, and the temperature was 48 ° C, and the reaction was 20 min, the sulfate, stirred, stirred 6min, filtered, absolute ethanol, and the temperature was 58 ° C under conditions. Drying, adding acetone solution, formulated a degree of diamond microprophetone acetone having a mass concentration of 10%;

[0041](2) Base treatment: After polishing the surface of the copper foil substrate, the ultrasound washed 21min in acetone solution, and then the deionized water was washed 7 min, and then soaked in the dilute acid solution of 10% in a concentration of 7 h, finally Deion water cleaning;

[0042](3) Preparation of a transition layer: Sputterin...

Embodiment 3

[0047](1) Diamond microfourly: The diamond fine powder is added to an ammonia water having a mass concentration of 25%, ultrasonic oscillating, 2H, water absolute ethanol solution, drying under temperature at 60 ° C, to obtain a diamond micropowery with surface aminosylation; The surface aminocylated diamond fine powder was dissolved in silver plating solution, stirred, and the temperature was 50 ° C, and the reaction was 25 min, stirred with ammonium sulfate, stirred, and the reaction was filtered, absolute ethanol washing, and the temperature was 60 ° C. Dry, add acetone solution, formulated into a degree of diamond microprophetone acetone having a mass concentration of 10%;

[0048](2) Base treatment: After polishing the surface of the single crystal silicon substrate, the ultrasound washed 25 min in acetone solution, and then washed at a deionized water for 10 min, and then soaked in a dilute acid solution at a concentration of 10%, finally Clean with deionized water;

[0049](3) Prep...

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PUM

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Abstract

The invention discloses a diamond film based on nanoparticle modification and a preparation method thereof. According to the diamond film based on nanoparticle modification, a silicon-based material, a metal material or a composite material is taken as a substrate, and metal Ni is sputtered on the upper surface of the substrate to serve as a transition layer; the flow of hydrogen, argon and methane gas, the gas pressure, the substrate temperature and the deposition time are reasonably optimized on the surface of the transition layer through a chemical vapor deposition method, so that the adhesive force on the film substrate is enhanced; and finally, the surface of the prepared diamond film is subjected to chemical corrosion, and coated with nano titanium dioxide particles so that the hydrophobic property and the self-cleaning property of the surface of the diamond film can be improved. The prepared diamond film can be widely applied to the fields of machinery, tools and molds, cutters, automobiles, electronics, optics, and decorative appearance protection, such as watch shells, jewelry accessories and mobile phone shells.

Description

Technical field[0001]The present invention relates to the technical field of diamond film, and is specifically a diamond film based on nanoparticle modification and a preparation method thereof.Background technique[0002]The diamond film has excellent polishing performance, and the nano diamond film has a more smooth surface and lower friction coefficient, and the friction coefficient can be less than 0.05. The micro-hardness measured by the nano-mechanical probe is as high as 8000kg / mm2, almost called " Never wear ", thus nano diamond film in electrical, friction wear, micro-electromechanical system, field emission, optical, electrical, electrical, thermal and optical, etc., such as having the largest Young Modul, the highest thermal conductivity, the highest disable bandwidth, the lowest dielectric constant, etc. These excellent physical chemical properties have made diamonds have broad application prospects in high-tech fields.[0003]At present, the process of preparing a diamond...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/02C23C14/35C23C14/16C23C16/27C23C16/56C23C18/08
CPCC23C16/0281C23C14/35C23C14/165C23C16/274C23C16/56C23C18/08
Inventor 满卫东朱长征龚闯吴剑波蒋剑宏蒋梅荣
Owner SHANGHAI ZHENGSHI TECH CO LTD
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