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Preparation method of spherical nano cerium dioxide

A nano-cerium dioxide, spherical technology, applied in the field of preparation of nano-CeO2

Pending Publication Date: 2021-06-22
LIAONING KELONG FINE CHEM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In general: these methods all have obvious process characteristics, and the prepared products also show certain performance characteristics, but it still takes a long time to explore to achieve industrial production scale

Method used

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  • Preparation method of spherical nano cerium dioxide
  • Preparation method of spherical nano cerium dioxide
  • Preparation method of spherical nano cerium dioxide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Spherical nano cerium oxide, the preparation method comprises the following steps:

[0041] 1) Dissolve cerous nitrate hexahydrate (analytically pure) in ethylene glycol to prepare a 0.4mol / L cerous nitrate ethylene glycol solution. Dissolve sodium hydroxide (analytically pure) in ethylene glycol to prepare a sodium hydroxide ethylene glycol solution with a concentration of 1.2mol / L. Under stirring, slowly pour 250ml of sodium hydroxide ethylene glycol solution into 250ml of cerous nitrate ethylene glycol solution, stir at 600rpm for 10min, and a precipitation reaction occurs.

[0042] 2) After the precipitation reaction is completed, add 40 g of hydroxypropyl cellulose (analytical pure) to the reaction system and stir at 600 rpm for 1 h to obtain a reaction mixture.

[0043] 3) Put the reaction mixture obtained in step 2) into an oil bath, continuously inject air into the reaction mixture and stir with a high-speed shear. Among them, the oil bath temperature is 140°C...

Embodiment 2

[0049] Spherical nano cerium oxide, the preparation method comprises the following steps:

[0050] 1) Dissolve cerous nitrate hexahydrate (analytically pure) in ethylene glycol to prepare a 0.7mol / L cerous nitrate ethylene glycol solution. Dissolve sodium hydroxide (analytically pure) in ethylene glycol to prepare a sodium hydroxide ethylene glycol solution with a concentration of 2.1mol / L. Under stirring, slowly pour 250 mL of sodium hydroxide ethylene glycol solution into 250 mL of cerous nitrate ethylene glycol solution, stir at 600 rpm for 10 min, and a precipitation reaction occurs.

[0051] 2) After the precipitation reaction is completed, add 40 g of hydroxypropyl cellulose (analytical pure) to the reaction system and stir at 600 rpm for 1 h to obtain a reaction mixture.

[0052] 3) Put the reaction mixture obtained in step 2) into an oil bath, continuously inject air into the reaction mixture and stir with a high-speed shear. Among them, the oil bath temperature is 1...

Embodiment 3

[0056] Spherical nano cerium oxide, the preparation method comprises the following steps:

[0057] 1) Dissolve cerous nitrate hexahydrate (analytically pure) in ethylene glycol to prepare a 0.3mol / L cerous nitrate ethylene glycol solution. Dissolve sodium hydroxide (analytically pure) in ethylene glycol to prepare a sodium hydroxide ethylene glycol solution with a concentration of 0.9 mol / L. Under stirring, slowly pour 250ml of sodium hydroxide ethylene glycol solution into 250ml of cerous nitrate ethylene glycol solution, stir at 600rpm for 10min, and a precipitation reaction occurs.

[0058] 2) After the precipitation reaction is completed, add 60 g of hydroxypropyl cellulose (analytical pure) to the reaction system and stir at 600 rpm for 1 h to obtain a reaction mixture.

[0059] 3) Put the reaction mixture obtained in step 2) into an oil bath, continuously inject air into the reaction mixture and stir with a high-speed shear. Among them, the oil bath temperature is 140°...

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Abstract

The invention provides a preparation method of spherical nano cerium dioxide. The preparation method comprises the following steps: respectively dissolving cerium salt and alkali in an organic solvent, then mixing the two solutions, and carrying out precipitation reaction; after the precipitation reaction is completed, adding a high-molecular polymer into a reaction system, and stirring to obtain a reaction mixture; carrying out high-speed shearing dispersion on the obtained reaction mixture at the temperature of 40-220 DEG C for 30 min-48 h, and continuously blowing oxidizing gas into the reaction system during the high-speed shearing dispersion; and centrifugally separating the obtained product to obtain a solid, washing and drying to obtain the spherical nano cerium dioxide. According to the method disclosed by the invention, the monodisperse spherical nano CeO2 with the particle size of 40 nm-200 nm can be prepared; meanwhile, the method disclosed by the invention has the characteristics of high process stability, high yield, high operability and the like, and is suitable for large-scale production.

Description

technical field [0001] The present invention relates to nanometer CeO 2 The field of preparation, specifically related to nano-CeO 2 Wet preparation in organic solvents. Background technique [0002] nano-CeO 2 It has unique light, sound, electricity, magnetism, heat and other properties, making it widely used in catalysis, grinding, glass, ceramics, cosmetics and other fields. For example, the effective removal rate of the oxide film and its own softness make CeO 2 It has become one of the main abrasive materials for the chemical mechanical polishing process in the semiconductor manufacturing industry. Especially in the shallow trench isolation (STI) chemical mechanical polishing process composed of silicon dioxide and silicon nitride deposition, thanks to the nano-CeO 2 At the same time, it has efficient removal of silicon dioxide layer and high selectivity to silicon dioxide and silicon nitride. Using nano-CeO 2 Polishing with abrasive material can realize high pol...

Claims

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Application Information

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IPC IPC(8): C01F17/235C01F17/10B82Y40/00
CPCC01F17/235C01F17/10B82Y40/00C01P2004/32C01P2004/64C01P2004/62
Inventor 孙林于艳敏姜艳季春伟王炳帅
Owner LIAONING KELONG FINE CHEM
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