A method for tuning the dm interaction of ferromagnetic multilayer films
A multi-layer film and ferromagnetic technology, applied in the field of high-density information storage and sensing, can solve the problems of difficult insulation, poor control uniformity, breakdown, etc., to reduce surface roughness, reduce oxide layer, and improve surface quality effect
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[0018] figure 1 The sample preparation conditions are as follows: firstly, the Si substrate with a thickness of 0.5 mm is cut into a suitable size, and the surface acidification treatment and heat treatment are carried out on it. Hydrofluoric acid is used for the surface acidification treatment, the pH value of the acidification treatment is 6, and the acidification time is 3 minutes. Afterwards, the substrates were ultrasonically cleaned with alcohol and acetone solutions respectively, the cleaning sequence was first the acetone solution and then the alcohol solution, and were cleaned twice, each time for 10 minutes. Then, utilize the magnetron sputtering method to sequentially deposit Pt atoms (with a thickness of ), Co atoms (thickness is ) and Ta atoms (thickness is ), the sputtering powers were 15W, 18W and 30W, respectively, to prepare Si substrates multilayer film. The background vacuum of the sputtering chamber is 1×10 -5 Pa, the flow rate of argon gas during...
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