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Preparation method of diamond neutron detector for eliminating polarization effect

A neutron detector and depolarization technology, which is applied in the measurement of neutron radiation, radiation measurement, instruments, etc., can solve the problems of detector performance degradation, improve charge collection efficiency, eliminate polarization effects, and improve Effects of Neutron Detection Efficiency and Count Rate

Pending Publication Date: 2022-02-18
ZHENGZHOU INST OF TECH +2
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the polarization effect in the existing diamond neutron detector causes the detector performance to decrease. The present invention provides a method for preparing a diamond neutron detector that eliminates the polarization effect

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  • Preparation method of diamond neutron detector for eliminating polarization effect
  • Preparation method of diamond neutron detector for eliminating polarization effect
  • Preparation method of diamond neutron detector for eliminating polarization effect

Examples

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Effect test

Embodiment 1

[0029] First, set the resistivity to 10 13 Ω·cm, the nitrogen content is less than 1ppb, and the thickness is 100μm. The diamond body material 1 is first placed in a nitrogen quartz furnace at 600°C for 20 minutes, and then placed in HNO in a water bath at 120°C. 3 :H 2 SO 4 :HClO 4 = Boiling in a 1:1:1 mixed solution for 40 minutes to remove carbides on the diamond surface; ultrasonically cleaning the diamond body material for 5 minutes with acetone, isopropanol, and deionized water, and then using 80°C hot deionized water and Rinse 5 times at intervals with deionized water at room temperature to remove the contamination of organic matter on the diamond surface, and then dry it with 99.99% high-purity nitrogen gas; put the dried diamond body material into the plasma surface treatment equipment for plasma surface cleaning, and the power of the plasma is 20W, the time is 10 minutes ( figure 2 ).

[0030] Secondly, put the treated diamond body material into the chemical va...

Embodiment 2

[0035] First, set the resistivity to 10 13 Ω·cm, the nitrogen content is less than 1ppb, and the thickness is 100μm. The diamond body material 1 is first placed in a nitrogen quartz furnace at 600°C for 20 minutes, and then placed in HNO in a water bath at 120°C. 3 :H 2 SO 4 :HClO 4 = Boiling in a 1:1:1 mixed solution for 40 minutes to remove carbides on the diamond surface; ultrasonically cleaning the diamond body material for 5 minutes with acetone, isopropanol, and deionized water, and then using 80°C hot deionized water and Rinse 5 times at intervals with deionized water at room temperature to remove the contamination of organic matter on the diamond surface, and dry it with high-purity nitrogen; put the dried diamond body material into the plasma surface treatment equipment for plasma surface cleaning, and the power of the plasma is 20W , with a time of 10 minutes ( figure 2 ).

[0036] Secondly, put the treated diamond body material into the chemical vapor depositi...

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Abstract

The invention discloses a preparation method of a diamond neutron detector for eliminating a polarization effect. The preparation method comprises the following steps: carrying out chemical cleaning and plasma surface treatment on a diamond body material; growing a silicon nitride passivation layer on the front surface of the diamond body material; preparing ohmic contact electrodes and polarization electrodes on the front surface and the back surface of the diamond respectively through high-vacuum equipment, wherein the back polarization electrodes must be located at the dead center position of the back of the diamond; arranging a silicon nitride passivation isolation layer between the ohmic contact electrodes and the polarization electrodes on the front surface of the diamond; connecting the polarized electrodes to two ends of a direct-current small-voltage power supply; and connecting the ohmic contact electrode to two ends of a high-voltage power supply. The preparation method of the diamond neutron detector for eliminating the polarization effect has the advantages of high charge collection efficiency, neutron detection efficiency, counting rate and the like, and has important application value in fast neutron detection in occasions of high-energy particle detection, spallation neutron sources, nuclear reactors and the like.

Description

technical field [0001] The invention relates to the technical field of neutron detection, in particular to a solution to the polarization effect of a diamond neutron detector. Background technique [0002] Among the new semiconductor materials, diamond is a wide bandgap direct bandgap semiconductor material with many excellent properties, such as large bandgap width, high electron-hole mobility, extremely high resistivity, low dielectric Constant, high thermal conductivity and superior radiation resistance. With the development of chemical vapor deposition technology (Chemical Vapor Deposition, CVD), CVD diamond has achieved great success. The methods and means of synthetic diamond have overcome its high price factor, and have higher crystal quality than natural diamond. Research on high-energy particle detection and applied radiation of diamond detectors in large accelerators. The neutron detector made of CVD diamond has the advantages of radiation resistance, high n / γ ra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01T3/00
CPCG01T3/00Y02P70/50
Inventor 朱志甫邹继军甘勇孙志嘉修青磊郭晨鲜刘艳张洋孔国利王少堂
Owner ZHENGZHOU INST OF TECH
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