Magnetor coupling resonance type micro-nano weighing device and preparation method thereof

A technology of coupling resonance and magnons, which is applied to the parts of magnetostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, device parts, etc., can solve the problems of large environmental impact and achieve absorption bandwidth change narrower, improved measurement accuracy, and reduced costs

Pending Publication Date: 2022-04-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The biggest disadvantage of the resonator based on the mechanical vibration of the cantilever beam is that it is g...

Method used

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  • Magnetor coupling resonance type micro-nano weighing device and preparation method thereof
  • Magnetor coupling resonance type micro-nano weighing device and preparation method thereof
  • Magnetor coupling resonance type micro-nano weighing device and preparation method thereof

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Embodiment 1

[0037] This embodiment proposes a magnon-coupled resonance micro-nano weighing device with a structure such as figure 1 As shown, including the [111] crystal orientation of the GdGaGa single crystal substrate and the short-circuited coplanar waveguide and resonator on the GdGaGa single-crystal substrate, the resonator is located in the center zone and the ground zone of the short-circuited coplanar waveguide between; the resonator is a double-layer film structure, including an upper layer of cobalt ferrite (CFO) film and a lower layer of yttrium iron garnet magnetic film;

[0038] Among them, the thickness of the cobalt ferrite film is 1 μm; the thickness of the yttrium iron garnet magnetic film is 1 μm; the overall structure of the resonator is cylindrical with a diameter of 1 mm; The characteristic impedance of the coplanar waveguide is 50 ohm, the width of the central strip and the ground strip is 50 μm, and the width of the waveguide at the short-circuit end is 70 μm.

[...

Embodiment 2

[0054] This embodiment proposes a magnon-coupled resonance micro-nano weighing device, including a [111] oriented gadolinium-gallium garnet single crystal substrate and a short-circuit coplanar waveguide and resonance on the gadolinium-gallium garnet single-crystal substrate. The resonator is located between the center strip and the grounding strip of the short-circuit coplanar waveguide; the resonator is a double-layer film structure, including an upper layer of FeGa alloy film and a lower layer of yttrium iron garnet magnetic film;

[0055] Among them, the thickness of the FeGa alloy film is 1 μm; the thickness of the yttrium iron garnet magnetic film is 1 μm; the overall structure of the resonator is cylindrical with a diameter of 1 mm; The characteristic impedance of the waveguide is 50 ohm, the width of the center strip and the ground strip is 50 μm, and the width of the waveguide at the short-circuit end is 70 μm.

[0056] This embodiment also proposes a method for prepa...

Embodiment 3

[0064] This embodiment proposes a magnon-coupled resonance micro-nano weighing device, including a [111] oriented gadolinium-gallium garnet single crystal substrate and a short-circuit coplanar waveguide and resonance on the gadolinium-gallium garnet single-crystal substrate. The resonator is located between the center strip and the ground strip of the short-circuit coplanar waveguide; the resonator is a double-layer film structure, including the upper layer of Fe 30 co 70 alloy thin film and the underlying yttrium iron garnet magnetic thin film;

[0065] Among them, Fe 30 co 70 The thickness of the alloy film is 1 μm; the thickness of the yttrium iron garnet magnetic film is 1 μm; the overall structure of the resonator is cylindrical, with a diameter of 1 mm; the material of the short-circuit coplanar waveguide is gold, and the thickness is 2 μm. The characteristics of the short-circuit coplanar waveguide The impedance is 50 ohm, the width of the central strip and the grou...

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Abstract

The invention provides a magneto coupling resonance type micro-nano weighing device and a preparation method thereof, and belongs to the technical field of micro-nano electronic functional devices.The device comprises a single crystal substrate, a short-circuit coplanar waveguide and a resonator, the short-circuit coplanar waveguide and the resonator are located on the single crystal substrate, and the resonator is located between a center band and a grounding band of the short-circuit coplanar waveguide; the resonator comprises a piezomagnetic film on the upper layer and a magnetic film on the lower layer, and the magnetic damping coefficient of the magnetic film is lower than 10 <-3 >. Preferably, the magnetic thin film is a yttrium iron garnet thin film, and the single crystal substrate is a gadolinium gallium garnet single crystal substrate with a [111] crystal orientation. According to the invention, an object with the mass at the nanogram level is accurately weighed based on a full-electromagnetic method, and compared with a traditional cantilever beam mechanical vibration resonant frequency test method, the method has the advantages that the requirement on the vacuum degree of a measurement environment is not strict, the cost is reduced, and the method has relatively high test sensitivity in a microwave frequency band; and the magnetic film with low ferromagnetic resonance line width is adopted, so that the overall absorption bandwidth of the resonator is narrowed, and absorption peak signals can be extracted.

Description

technical field [0001] The invention belongs to the technical field of micro-nano electronic functional devices, and in particular relates to a magnon-coupled resonance micro-nano weighing device and a preparation method thereof. Background technique [0002] Thanks to the development of micro-nano processing technology and quantum technology, objects with size and quality at the micro-nano level in nature have entered people's field of vision. At present, there have been many studies on measuring the mass of tiny objects by using the resonant frequency shift of the resonator, but most of them are based on the resonator constructed by the micromechanical system. The idea is generally to place a tiny object on the tip of the cantilever beam, and apply an AC voltage between the cantilever beam and the bottom electrode to cause the cantilever beam to vibrate mechanically. When the external AC voltage frequency is the same as the natural frequency of the cantilever beam, the vi...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C1/00G01G9/00H01L41/06
Inventor 金立川宋祥林吴雪蕊徐嘉鹏张怀武钟智勇
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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