Magnetor coupling resonance type micro-nano weighing device and preparation method thereof

Abstract

The invention provides a magneto coupling resonance type micro-nano weighing device and a preparation method thereof, and belongs to the technical field of micro-nano electronic functional devices.The device comprises a single crystal substrate, a short-circuit coplanar waveguide and a resonator, the short-circuit coplanar waveguide and the resonator are located on the single crystal substrate, and the resonator is located between a center band and a grounding band of the short-circuit coplanar waveguide; the resonator comprises a piezomagnetic film on the upper layer and a magnetic film on the lower layer, and the magnetic damping coefficient of the magnetic film is lower than 10 <-3 >. Preferably, the magnetic thin film is a yttrium iron garnet thin film, and the single crystal substrate is a gadolinium gallium garnet single crystal substrate with a [111] crystal orientation. According to the invention, an object with the mass at the nanogram level is accurately weighed based on a full-electromagnetic method, and compared with a traditional cantilever beam mechanical vibration resonant frequency test method, the method has the advantages that the requirement on the vacuum degree of a measurement environment is not strict, the cost is reduced, and the method has relatively high test sensitivity in a microwave frequency band; and the magnetic film with low ferromagnetic resonance line width is adopted, so that the overall absorption bandwidth of the resonator is narrowed, and absorption peak signals can be extracted.

Description

technical field [0001] The invention belongs to the technical field of micro-nano electronic functional devices, and in particular relates to a magnon-coupled resonance micro-nano weighing device and a preparation method thereof. Background technique [0002] Thanks to the development of micro-nano processing technology and quantum technology, objects with size and quality at the micro-nano level in nature have entered people's field of vision. At present, there have been many studies on measuring the mass of tiny objects by using the resonant frequency shift of the resonator, but most of them are based on the resonator constructed by the micromechanical system. The idea is generally to place a tiny object on the tip of the cantilever beam, and apply an AC voltage between the cantilever beam and the bottom electrode to cause the cantilever beam to vibrate mechanically. When the external AC voltage frequency is the same as the natural frequency of the cantilever beam, the vi...

AI Technical Summary

Problems solved by technology

The biggest disadvantage of the resonator based on the mechanical vibration of the cantilever beam is that it is greatly affected by the environment, and the measured results under vacuum and normal atmospheric pressure are different.

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