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Method for preparing composite material of aluminium oxide-diamond

A composite material and manufacturing method technology, applied in the field of alumina-diamond composite material manufacturing, can solve the problems of difficult formation of large-area diamond film, influence of diamond film uniformity, and poor continuity of diamond film, so as to reduce defect density and smooth The effect of good sex and excellent performance

Inactive Publication Date: 2007-02-14
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Due to the large difference in thermal expansion coefficient and crystal structure between alumina ceramics and diamond, the following problems obviously exist in the growth of diamond films on the surface of alumina ceramics: (1) the film and the substrate are prone to peeling off during heating or cooling; (2) ) It is difficult to form diamond nuclei on the surface of alumina ceramics, and it is not easy to form a large-area diamond film; (3) The continuity of the diamond film is poor and the graphite phase content is high
In order to solve the above problems, it is generally used to mechanically infiltrate diamond micropowder on the surface of alumina ceramics as a crystal nucleation agent, but it is difficult to distribute the crystal nucleation agent evenly, thus affecting the uniformity of the diamond film.

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Embodiment one: the specific process steps of the present embodiment are as follows:

[0028] a. Preparation of pure alumina ceramic powder: Calcining nano-alumina powder with a purity of 99.99% for phase inversion treatment at a temperature of 1250° C. Its weight adds 0.3% magnesia and 0.15% lanthanum oxide, and puts into alumina ball mill bucket, is 1: 1.5: 1 ratio to add pure alumina ball and deionized water with material: ball: water ratio, with Ball milling at a speed of 200 rpm for 20 hours, and then discharge and dry; pass the dried dry material through a 60-mesh standard sieve, put the obtained powder into an alumina crucible, and place it in a silicon carbide rod electric furnace Inside, the calcination is carried out under the air atmosphere, the calcination temperature is 1250° C., and the temperature is kept for 2 hours. The synthesized nanometer pure alumina ceramic powder is obtained.

[0029] b. Add diamond micropowder: in the synthetic pure alumina cer...

Embodiment 2

[0033] Embodiment 2: This embodiment is basically the same as the above-mentioned embodiment, the difference is:

[0034] a. Preparation of pure alumina ceramic parts: the nano-alumina powder with a purity of 99.99% is subjected to calcination and phase inversion treatment, the calcination temperature is 1250 ° C, and the heat preservation is 2 hours, and then the calcined nano-alumina powder is pressed Its weight adds 0.4% magnesium oxide and 0.2% lanthanum oxide, and puts into the aluminum oxide ball mill bucket, is 1: 1.5: 1 ratio to add pure alumina ball and deionized water with material: ball: water ratio, with Ball milling at a speed of 200 rpm for 24 hours, and then discharge and dry; pass the dried dry material through a 60-mesh standard sieve, put the obtained powder into an alumina crucible, and place it in a silicon carbide rod electric furnace Inside, the calcination is carried out under the air atmosphere, the calcination temperature is 1250° C., and the temperatu...

Embodiment 3

[0038] Embodiment 3: This embodiment is basically the same as the above-mentioned embodiment, the difference is:

[0039] a. Preparation of pure alumina ceramic powder: Calcining nano-alumina powder with a purity of 99.99% for phase inversion treatment at a temperature of 1250° C. Its weight adds 0.2% magnesia and 0.1% lanthanum oxide, and puts into alumina ball mill bucket, is 1: 1.5: 1 ratio to add pure alumina ball and deionized water with material: ball: water ratio, with Ball milling at a speed of 200 rpm for 24 hours, and then discharge and dry; pass the dried dry material through a 60-mesh standard sieve, put the obtained powder into an alumina crucible, and place it in a silicon carbide rod electric furnace Inside, the calcination is carried out under the air atmosphere, the calcination temperature is 1250° C., and the temperature is kept for 2 hours. The synthesized nanometer pure alumina ceramic powder is obtained.

[0040] B. Add diamond micropowder: in the pure a...

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Abstract

A process for preparing the composite alumina-diamond material used as the substrate of LSI includes such steps as preparing the high-purity alumina ceramics system, adding combustion aid, calcining, adding superfine diamond powder, hot die pressing, sintering, and chemical vapour deposition of diamond film.

Description

Technical field: [0001] The invention relates to a method for manufacturing an alumina-diamond composite material, which belongs to an inorganic composite material manufacturing process [0002] technology field. Background technique: [0003] VLSI has entered the era of commercialization, and ULSI, which is reflected in the three major fields of memory, microprocessor and application-specific integrated circuits, is moving towards high integration, high speed, and high performance system integration. While developing in the direction of full-scale integration (WSI), the area of ​​the chip has also increased hundreds of times from the initial few square millimeters. With the continuous improvement of integration, the size of individual components is continuously reduced, and the heat dissipation per unit area is getting larger and larger. ) This requires that the substrate material of the package package has a very high thermal conductivity in order to dissipate the heat g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/117C04B35/622C04B35/10
Inventor 沈悦顾峰夏义本
Owner SHANGHAI UNIV
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