Process for preparing modified non-crystal carbon film by metal iron implantation

A technology of metal ion implantation and amorphous carbon film, which is applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of restricting wide application

Inactive Publication Date: 2002-08-14
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The friction performance is greatly affected by the external environment. Li Liuhe et al. (Acta Tribology, 2001, Vol 21, No 1, 76-80) have made a comprehensive comparison of the friction properties of diamond-like carbon films prepared by different methods in different environments. , indicating that when the load, ambient humidity, and dual materials change, the friction coefficient of diamond-like carbon can change in such a large range from 0.06 to 0.58. Therefore, the good lubricating performance of the amorphous carbon film can only be obtained in a specific limited environment. reflected, these shortcomings limit its wide application

Method used

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  • Process for preparing modified non-crystal carbon film by metal iron implantation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] (1) Compression of the sputtering target: 400 mesh graphite powder in 10 8 Under the pressure of Pa, it is pressed into a graphite target with a thickness of about 2.5mm and a diameter of 60mm.

[0022] (2) Wash the monocrystalline silicon wafer (111) in 90°C hydrogen peroxide and concentrated sulfuric acid (volume ratio 3:7) for 20 minutes, rinse it with distilled water, dry it, place it in a DC magnetron sputtering deposition chamber, and evacuate it to Residual air pressure 1×10 -3 Pa, the deposition atmosphere is Ar, the deposition pressure is about 1.0Pa, the substrate negative pressure is -120V, the target voltage is 700V, the deposition time is 10min, and the thickness is about 100nm.

[0023] (3) Silver ion implantation is carried out on a metal ion implanter, using a φ6 silver rod as a target source, accelerating voltage 50kV, arc current 60A, average beam current 0.5mA, implantation dose 5×10 15 ions / cm 2 , the vacuum degree was kept at 1.2×10 during the in...

Embodiment 2

[0026] (1), (2) steps are with embodiment 1.

[0027] (3) Change the silver in Example 1 into chromium, arc current 40A, average beam current density 1.5mA, implant dose 3×10 16 ions / cm 2 . Other steps are the same as in Example 1.

Embodiment 3

[0029] Preparation of silver ion implanted amorphous carbon film on stainless steel and bearing steel.

[0030] (1) The steps are the same as in Example 1.

[0031] (2) Grind the stainless steel and bearing steel blocks on No. 400, 600, 800, and 1000 water sandpaper in sequence, and then pass through AI 2 o 3 Polish to a surface roughness Ra of less than 0.05 μm. Ultrasonic cleaning in ethanol and acetone respectively for 20 minutes, dried and sent to the DC magnetron sputtering deposition chamber.

[0032] (3) All the other steps are the same as in Example 1.

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Abstract

A metal iron implantation process for preparing modified non-crystal carbon film features that the graphite and metal are used to prepare a modified and physical gas-phase deposited layer by CD magnetically controlled sputter and ion implantation. Its advantages are high antiwear and lubricating performance and simple preparing process.

Description

Technical field: [0001] The invention relates to a modified amorphous carbon film and a preparation method thereof. Background technique: [0002] Coating and ion implantation are two important surface treatment technologies, which can effectively improve the surface corrosion resistance and wear resistance of tool components. Amorphous carbon film, also known as diamond-like carbon film, has many excellent properties similar to diamond, such as high thermal conductivity, small thermal expansion coefficient, good chemical stability, extremely high resistivity and high doping, infrared to ultraviolet range It has high light transmittance, high hardness and elastic modulus, good wear resistance and low friction coefficient, etc., and has a simpler preparation method than diamond, so it has attracted people's attention in the past two decades. In particular, ultra-thin amorphous carbon films have broad application prospects in the lubrication of disks, the protection and lubri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34C23C14/48
Inventor 阎逢元韩修训张爱民刘维民
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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