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Lithium niobate substrate and manufacturing method thereof

A manufacturing method, technology of lithium niobate, applied in chemical instruments and methods, manufacturing/assembly of piezoelectric/electrostrictive devices, niobium compounds, etc. Problems such as batch blackening and fluctuation, to prevent the reduction of yield

Active Publication Date: 2005-06-01
SUMITOMO METAL MINING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, in the methods described in Japanese Patent Laying-Open No. 11-92147 and Japanese Patent Laid-Open No. 11-236298, since the LN crystal is heated to a high temperature above 500° C., the processing time is short, but conversely, there is the following problem: Blackening fluctuations between batches are produced, and uneven hue caused by blackening is easy to occur on the heat-treated substrate, that is, the distribution of volume resistivity in the plane is easy to occur, and it still cannot fully prevent finished products in the component manufacturing process rate reduction

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] LN single crystals with a diameter of 4 inches were grown using the Zokoralski method using the raw materials of the adapted components. The cultivation atmosphere is a nitrogen-oxygen mixed gas with an oxygen concentration of about 20%. The obtained crystal was transparent pale yellow.

[0035] The crystal was subjected to a heat treatment for removing residual distortion and a polarity adjustment treatment for forming a single polarization under soaking, then peripheral grinding was performed to shape the shape of the crystal, and sliced ​​to form a substrate.

[0036] The obtained substrate was embedded in aluminum (Al) powder, and heat-treated at 480° C. for 20 hours in a vacuum atmosphere.

[0037] The substrate after heat treatment is black, and the volume resistivity is about 10 7 About Ω·cm, no unevenness in hue was observed visually. In addition, the said volume resistivity is measured based on the 3-terminal method of JISK-6911 standard.

[0038] Next, the...

Embodiment 2

[0041] Heat treatment was carried out under substantially the same conditions as in Example 1 except that the heat treatment temperature was 300°C.

[0042] The obtained substrate is brown in color and has a volume resistivity of about 10 12 About Ω·cm, no unevenness in hue was observed visually.

[0043] In addition, in the heat cycle test, the surface potential at the instant when the substrate was placed on the heating plate was 500 V or less, and no spark phenomenon was observed on the substrate surface.

Embodiment 3

[0045] The polarity-adjusting LN crystal was embedded in aluminum (Al) powder, and heat-treated at 300° C. for 20 hours in a nitrogen atmosphere.

[0046] The obtained LN crystals were brown. In order to shape the shape of the crystal, peripheral grinding is performed, and the substrate obtained by slicing is brown and has a volume resistivity of about 10. 12 About Ω·cm, no unevenness in hue was observed visually.

[0047] When the substrate was placed on a heating plate for a thermal cycle test, the surface potential at the moment the substrate was placed on the heating plate was 500 V or less, and no sparks were observed on the surface of the substrate.

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PUM

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Abstract

The present invention provides a method for manufacturing a lithium niobate substrate by using lithium niobate crystals cultivated by the Zokoralski method, which is characterized in that the lithium niobate crystals are embedded in a substrate composed of Al, Ti, Si, In the state of powder consisting of at least one element selected from the group consisting of Ca, Mg, and C, or contained in at least one element selected from the group consisting of Al, Ti, Si, Ca, Mg, and C In the state in the container composed of elements, heat treatment is carried out at a temperature of 300°C or higher and less than 500°C.

Description

technical field [0001] The present invention relates to a lithium niobate substrate used in surface acoustic wave devices and the like, and in particular, to a lithium niobate substrate that is less likely to cause a decrease in yield during the device manufacturing process, and to a method for manufacturing the same. Background technique [0002] Lithium niobate (LiNbO 3 ; hereinafter referred to as LN) crystal, which is an artificial ferroelectric crystal with a melting point of about 1250°C and a Curie temperature of about 1140°C. Meanwhile, LN substrates obtained from LN crystals (hereinafter, simply referred to as substrates) are mainly used as materials for surface acoustic wave devices (SAW filters) for removing signal noise in mobile phones. [0003] The above-mentioned SAW filter (surface acoustic wave element) has a structure in which a pair of comb-shaped electrodes are formed on a substrate composed of a piezoelectric material mainly composed of LN, using a meta...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01G33/00C30B23/00C30B25/00C30B28/12C30B28/14C30B29/30C30B33/00C30B33/02H01L41/02H01L41/22H03H9/02
CPCC30B29/30C30B33/00
Inventor 梶谷富男角田隆
Owner SUMITOMO METAL MINING CO LTD
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