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Method for coating sensing material on substrate of plane type gas sonsor

A gas sensor and sensitive material technology, which is applied to devices, coatings, special surfaces, etc. that apply liquid to the surface. Effect of heating power consumption

Inactive Publication Date: 2005-08-24
北京青鸟元芯微系统科技有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional gas sensor is made of a ceramic tube structure, which is handmade. There are two disadvantages: one is that the sensitive electrode is manually painted with gold paste, which has poor consistency and is not suitable for mass production.
The second is that the heating method is indirect heating through ceramic tubes, which has low heat utilization rate, large volume, and high power consumption of element heating, which is not suitable for portable instruments and building intelligent control weak current systems.
Planar gas sensors have also been explored, which are generally divided into two types: one is planar thick film components, which use screen printing to print heating wires and signal electrodes on ceramic planar substrates, and the film formation method is also screen printing. The problem of the consistency of the die electrode is solved, but due to the limitation of the screen plate making technology, the die area is still large, and the problem of high power consumption has not been solved; the other is the sputtering thin film element manufactured by the semiconductor process technology. While solving the problem of the uniformity of the die electrode, the area of ​​the die is reduced, the consistency of the components is greatly improved, and the power consumption of the components is reduced. However, the film formation method is sputtering film formation, and the sensitive film group produced It is not easy to control, and the sensitivity to gas is too low. The most important thing is that the stability is poor and it is difficult to realize industrial production.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] 1. Handling of sensitive materials:

[0027] 1), the SnO 2 Grinding to a powder with a diameter of 5 microns;

[0028] 2), polyvinyl alcohol is configured into 0.1g / ml ethanol solution;

[0029] 3), the SnO 2 The powder is evenly mixed with the ethanol solution of polyvinyl alcohol to make a sensitive slurry;

[0030] 4), the sensitive slurry was ground with a ball mill for 8 hours, 100 rpm;

[0031] 5) Place the ground sensitive slurry under negative pressure for 5 minutes.

[0032] 2. Activation pretreatment of the substrate:

[0033] 1) The substrate is successively put into absolute ethanol and deionized water, and cleaned with ultrasonic waves;

[0034] 2), compressed air to dry the substrate;

[0035] 3) Put the substrate into H with a concentration of 0.02mol / l 2 PtCl 6 Soak in nitric acid solution for 20 seconds, H 2 PtCl 6 The molar ratio with nitric acid is 1:6;

[0036] 4) Dry the substrate with compressed air;

[0037] 5) The substrate is anneal...

Embodiment 2

[0045] 1. Activation pretreatment of the substrate:

[0046] 1) The substrate is successively put into absolute ethanol and deionized water, and cleaned with ultrasonic waves;

[0047] 2), compressed air to dry the substrate;

[0048] 3) Put the substrate into H with a concentration of 0.05mol / l 2 PtCl 6 Soak in nitric acid solution for 10 seconds, H 2 PtCl 6 The molar ratio with nitric acid is 1:6;

[0049] 4) Dry the substrate with compressed air;

[0050] 5) The substrate is annealed at a high temperature of 300° C. for 40 minutes under nitrogen protection.

[0051] 2. Coating:

[0052] 1) Level the micro-dispenser workbench, and position the substrate at a suitable position on the workbench;

[0053] 2) Set the required program on the control computer of the dispensing machine, adjust the x and y directions of the substrate, and align the discharge port with the correct position on the die;

[0054] 3) Inject the sensitive slurry into the barrel, open the air pres...

Embodiment 3

[0058] 1. Handling sensitive slurry:

[0059] 1), the TiO 2 Grinding to a powder with a diameter of 5 microns;

[0060] 2), polyvinyl alcohol is configured into a 1g / ml ethanol solution;

[0061] 3), the TiO 2 The powder is evenly mixed with the ethanol solution of polyvinyl alcohol to make a sensitive slurry;

[0062] 4), the sensitive slurry was ground with a ball mill for 8 hours, 300 rpm;

[0063] 5) Place the ground sensitive slurry under negative pressure for 20 minutes.

[0064] 2. Coating:

[0065] 1) Level the micro-dispenser workbench, and position the substrate at a suitable position on the workbench;

[0066] 2) Set the required program on the control computer of the dispensing machine, adjust the x and y directions of the substrate, and align the discharge port with the correct position on the die;

[0067] 3) Inject the sensitive slurry into the barrel, open the air pressure control main valve, and make the air pressure of the main valve reach 5.0Kg;

[0...

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Abstract

A method for coating the sensing material on the substrate of flat gas sensor includes such steps as grinding the inorganic sensing material particles, mixing with solvent to obtain slurry, immersing said substrate in the solution of transition metal chloride for activating it, drying by compressed air, annealing in N2, and coating the slurry onto said substrate by micro-slurry applicator.

Description

technical field [0001] The invention relates to a coating method of a sensitive material of a gas sensor, in particular to a coating method of a sensitive material on a planar gas sensor substrate. Background technique [0002] Miniaturization, good consistency, good reliability, and mass production are the current development trends of gas sensors. The traditional gas sensor is made of a ceramic tube structure, which is handmade. It has two disadvantages: one is that the sensitive electrode is hand drawn with gold paste, which has poor consistency and is not suitable for mass production. The second is that the heating method is indirect heating through ceramic tubes, which has low heat utilization rate, large volume, and high power consumption of element heating, which is not suitable for portable instruments and building intelligent control weak current systems. Planar gas sensors have also been explored, which are generally divided into two types: one is planar thick fil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D5/00B05D7/24
Inventor 孔祥霞董汉鹏张威
Owner 北京青鸟元芯微系统科技有限责任公司
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