Nano organic solvent silicasol and preparation method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- UNIV OF ELECTRONICS SCI & TECH OF CHINA
- Publication Date
- 2005-11-23
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of nanometer materials, in particular to a nanometer organic solvent silica sol and a preparation method thereof. Background technique
[0002] SiO 2 Sol (also known as silica sol) is a polymer amorphous SiO 2 A colloidal solution of particles dispersed in a solvent. After American Bird invented the use of ion exchange to produce silica sol in 1941, silica sol has gradually been widely used in the manufacturing fields of fibers, fabrics, paper, coatings, adhesives, paints, ceramics, medicine, food, precision casting and electronic industries. ground application. Now, in the semiconductor industry, silica sol is used for precision polishing of silicon wafers, and the application prospect is very broad.
[0003] Silica sol can be divided into water-solvent silica sol or organic solvent silica sol according to the different properties of the solvent. Water solvent silica sol SiO 2 Its concentration is gen...