Method for preparing LLTO(lithium lanthanum titanate) film by electron beam heat evaporation

A lithium lanthanum titanium oxide and electron beam technology is applied in the field of preparation of lithium lanthanum titanium oxide thin films, which can solve the problems of poor deposition efficiency and small deposition area.

Inactive Publication Date: 2006-06-21
FUDAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] There have been many reports on the preparation methods of lithium lanthanum titanium oxide thin films, generally by pulsed laser sputtering LLTO target, in Ar+O 2 Lithium lanthanum titanium oxide film is deposited by heating under ambient conditions, but the deposition efficiency is poor (small deposition area)

Method used

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  • Method for preparing LLTO(lithium lanthanum titanate) film by electron beam heat evaporation
  • Method for preparing LLTO(lithium lanthanum titanate) film by electron beam heat evaporation
  • Method for preparing LLTO(lithium lanthanum titanate) film by electron beam heat evaporation

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Embodiment 1

[0016] In the present invention, a lithium lanthanum titanium oxide (LLTO) solid electrolyte thin film is prepared by an electron beam thermal evaporation method. It is carried out in a vacuum system of electron beam thermal evaporation. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa, then the flow ratio of the argon gas and oxygen gas that is passed into the vacuum chamber is controlled by two needle valves to be 2:1, the direction of the inlet is facing the deposition substrate, and the flow rate of the mixed gas is adjusted to keep the pressure of the vacuum chamber at 7×10 -2 Pa. When vaporized, the electron gun output power was 600 watts. Substrate and LiPO 3 The target distance is 30 cm. The deposition rate was 1.6 μm per hour. The substrate temperature was room temperature. Use stainless steel sheet or stainless steel sheet coated with electrode film, glass sheet or glass sheet coated with Au film as the substrate. LLTO...

Embodiment 2

[0021] First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa, then the flow ratio of the argon gas and oxygen gas that is passed into the vacuum chamber is controlled by two needle valves to be 2:1, the direction of the inlet is facing the deposition substrate, and the flow rate of the mixed gas is adjusted so that the air pressure of the vacuum chamber is maintained at 5×10 -2 Pa. During evaporation, the electron gun output power was 300 watts. Substrate and LiPO 3 The target distance is 30 cm. The deposition rate was 1.0 μm per hour. The substrate temperature was room temperature. Use stainless steel sheet or stainless steel sheet coated with electrode film, glass sheet or glass sheet coated with Au film as the substrate. LLTO target by Li 2 CO 3 (98%), La 2 o 3 (99.95%) and TiO 2 (98%) powder was annealed at 900°C for 8 hours in air at a molar ratio of 1:1:4, and then pressed into discs.

[0022] The as-deposited film has an a...

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Abstract

The invention, belonging to lithium ion hull cell technical field, relates the method for preparation of LLTO used for solid state thin film lithium battery. The invention adopts the electron-beam vapor deposition method to prepare LLTO, comprising the following characteristics: large film deposit area, big deposition rate, and lithium ion ionic conductivity being 2í‡10-7S/cm. The LiCoO2 or LiMn2O4, LiPON and antiabrasion layer film, which are made with the method of radio-frequency magnetic control sputtering, and the metallic lithium anode film made with the method of vacuum heat evaporation are assembled to solid state thin film lithium battery. The specific capacity of cell is 45mAh/cm2-ª–m and 24mAh/cm2-ª–m, and the cycle index is up to 150 times. So the LLTO solid state electrolyte thin film made by the method of electron-beam evaporation can be used in solid state thin film lithium battery.

Description

technical field [0001] The invention belongs to the technical field of lithium ion thin film batteries, and in particular relates to a preparation method of a lithium lanthanum titanium oxide thin film used as an inorganic solid electrolyte of a lithium ion all-solid thin film battery. Background technique [0002] With the miniaturization of microelectronic devices, it is urgent to develop a matching miniaturized and long-life power supply. Compared with other chemical batteries, the all-solid-state rechargeable lithium-ion thin film battery has the largest specific capacity, long charge and discharge life, and good safety performance. Therefore, the development of all-solid-state rechargeable lithium-ion thin film batteries has a wide application background. All-solid-state thin-film lithium-ion batteries can be divided into two categories according to the polymer electrolyte and inorganic solid-state electrolyte used. Although polymer electrolyte lithium-ion batteries h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/54
Inventor 李驰麟傅正文
Owner FUDAN UNIV
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