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Prepn process of extreme ultraviolet and soft X-ray filtering metal film

A filter film and X-ray technology, applied in metal material coating process, sputtering coating, ion implantation coating and other directions, can solve problems such as film defects, achieve the effect of low cost, easy storage and simplified process

Inactive Publication Date: 2007-01-03
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The release agents used in the past, such as sodium chloride and cesium iodide, are easy to deliquescence, and have strict requirements on the storage environment, otherwise it is easy to cause defects to the film coated on the release agent

Method used

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  • Prepn process of extreme ultraviolet and soft X-ray filtering metal film

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Experimental program
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Effect test

Embodiment 1

[0019] Please refer to the preparation method flowchart of the preparation method of extreme ultraviolet and soft X-ray metal filter film of the present invention, the embodiment of the present invention is in vacuum chamber pressure 1 * 10 -3 Pa, carried out at room temperature. Use a high-vacuum thermal evaporation coating machine, use sodium stearate powder as the raw material of the release agent, and use a constantan-copper thermocouple to monitor the temperature of the molybdenum boat.

[0020] Put an appropriate amount of sodium stearate powder in the evaporating boat (molybdenum boat), put high-purity aluminum wire in the other evaporating boat (tungsten wire), and place the cleaned polished glass substrate about 20cm above the two evaporating boats , using molybdenum boat and tungsten wire resistance heating method to provide evaporation heat.

[0021] Close the vacuum chamber and perform pumping. When the vacuum reaches 1×10 -3 Start evaporation at Pa, first evapo...

Embodiment 2

[0025] Use a high-vacuum thermal evaporation coating machine, use sodium stearate powder as the raw material of the release agent, and use a constantan-copper thermocouple to monitor the temperature of the molybdenum boat.

[0026] Put an appropriate amount of sodium stearate powder in the evaporation boat (molybdenum boat), place the cleaned polished glass substrate at a position about 20 cm above the evaporation boat, and use the molybdenum boat heating method to provide evaporation heat.

[0027] Close the vacuum chamber and carry out pumping until the vacuum degree reaches 1×10 -3 Pa began to vapor-deposit sodium stearate. The thickness of the coating film is controlled by a quartz crystal vibration film thickness controller, the thickness of the sodium stearate film is controlled at 0.2-0.32 μm, and the evaporation is stopped.

[0028] Open the vacuum chamber, take out the coated glass substrate, and place it in a drying cylinder for 2 to 6 days. Take out the glass subs...

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Abstract

The present invention is preparation process of extreme ultraviolet and soft X-ray filtering metal film in a vacuum coating equipment and with sodium stearate as film removing agent. The preparation process includes the following steps: setting two evaporating boats holding sodium stearate powder and filtering film material separately inside the vacuum coating equipment; setting the substrate in side the vacuum coating equipment; closing the vacuum chamber and vacuum pumping; heat vaporizing to coat sodium stearate film; vaporizing to coat the filtering film; filling air to the vacuum chamber and taking out the coated substrate; removing the film to obtain the product; and inspection. The present invention has easy film separation, relaxed technological conditions, low cost and other advantages.

Description

technical field [0001] The preparation method of the extreme ultraviolet and soft X-ray metal filter film of the invention relates to the preparation of a metal filter film for extreme ultraviolet and soft X-ray optics. Background technique [0002] In X-ray laser application experiments, the observation of plasma density and short-wavelength astronomical telescopes all require optical components such as self-supporting filter films corresponding to these wavelengths. The usual method of making this kind of filter film is to first coat a layer of release agent on a flat and smooth substrate, then deposit a layer of filter film by physical or chemical methods, and then melt and release the film in the release agent solution. agent, transfer the filter film to the corresponding holder. Therefore, the release agent is indispensable for the development of self-supporting filter films, and its performance directly affects the quality of the prepared films. [0003] The release ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/06
Inventor 吴永刚曹鸿张莉焦宏飞付联效
Owner TONGJI UNIV
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