Prepn process of boron strontium titanate film material
A barium strontium titanate thin film and thin film technology, which is applied in the field of ferroelectric thin film material preparation, can solve the problems of large process compatibility of BST thin films, and achieve the effects of good ferroelectric performance and uniform grain size
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[0033] The preparation method of the barium strontium titanate film material of the present invention includes the following steps:
[0034] (1) Oxidized substrate
[0035] Using P-type (100) single crystal silicon (0.5mm thick), a layer of 500nm thick SiO is wet-oxidized 2 ;
[0036] (2) Cleaning the substrate
[0037] After the substrate is soaked in potassium dichromate solution for ten minutes, rinse with deionized water, boil in deionized water for five minutes, and dry; ultrasonically clean in acetone for three minutes and dry; ultrasonically clean in alcohol three Minutes to dry;
[0038] (3) Preparation of bottom electrode
[0039] Install a platinum target and a titanium target in the magnetron sputtering vacuum chamber, install the mask I and the substrate on the substrate holder, sputter the titanium for 30 seconds, and then sputter the platinum for 100 seconds;
[0040] (4) Sputtering BST film
[0041] Using self-made radio frequency magnetron sputtering equipment with...
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