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Electro-optical detector capable of calibrating voltage

A technology for calibrating voltages and detectors, used in electronic circuit testing, measuring current/voltage, instruments, etc., and can solve problems such as non-uniformity

Inactive Publication Date: 2008-12-03
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the electro-optical signal waveforms and relative time relationships measured at points A and B are consistent with reality, but the amplitudes of electro-optical signals measured at these two different points are different due to the influence of adjacent wiring. Voltage calibration cannot be performed directly by experiment

Method used

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  • Electro-optical detector capable of calibrating voltage
  • Electro-optical detector capable of calibrating voltage
  • Electro-optical detector capable of calibrating voltage

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Embodiment 1 The structure and working principle of the electro-optical probe of the present invention

[0027] The structure of the electro-optical probe of the present invention is as image 3 shown. The transparent substrate 1 can be transparent silicon oxide glass or a transparent crystal that has no birefringence effect on the probe light. A layer of anti-reflection film 2 is coated on the upper surface of the transparent substrate 1, and a layer of grounded conductive film 3 with selective reflection characteristics is coated on the lower surface of the transparent substrate 1. The conductive film has a reflectivity r of about 0.35 for the wavelength of the probe light. 1 and a transmittance t around 0.65 1 . reflectivity r 1 and transmittance t 1 The optimal selection of the specific value of the measured circuit is related to the reflectivity r of the metal microstrip line 5 for the transmission of the electrical signal to the probe light 2 Associated. i...

Embodiment 2

[0033] Embodiment 2 Electro-optical detection optical unit structure used in conjunction with the electro-optic probe of the present invention

[0034] The electro-optical detection optical unit used in conjunction with the electro-optic probe of the present invention is as Figure 4 shown. Wherein, 7 is the driving device of the laser. If electro-optic sampling measurement is to be done, the driving device 7 of the laser should be a microwave signal generator, and the microwave power of its output drives the laser device 8 to generate a gain switch ultrashort pulse beam; if the electro-optic measurement of continuous light is to be done, the driving device 7 of the laser Should be a DC power supply. The laser 8 may be a laser diode, which generates near-infrared light of any wavelength within the range of 1.25 microns to 1.3 microns as probe light. The detection beam is transformed into parallel light by the collimator lens 9, its polarization direction is determined by th...

Embodiment 3

[0038] The preparation of embodiment 3 electro-optical medium layer

[0039] The electro-optic medium layer 4 can be any electro-optic material film with rotational axis symmetry, and a convenient and applicable material is a non-linear optical material film prepared by sol-gel method.

[0040] Dissolve the appropriate proportion of chromophores and crosslinking agent materials in the same solvent to form a sol, and evenly spin-coat the sol on the grounded conductive film 3 of the transparent substrate 1, and perform corona polarization and heat curing on the formed dielectric film Processing, that is to obtain a polarized polymer film with electro-optic effect, the polarization direction is the normal direction of the grounding conductive film 3, and also the direction of the rotational symmetry axis of the film material, and the thickness of the film requires that when the electro-optic probe 14 contacts the electric signal transmission line The vertical distance from the me...

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Abstract

The invention discloses an electrooptical detector of voltage calibration in the integrated circuit measuring device, which comprises the following parts: laser device 8, microscope lens 13, electrooptical probe 14, luminous light source 15, filter lens 16 and photoelectric detector 26, wherein the electrooptical probe 14 is composed of transparent base plate 1, antireflecting film 2 on the upper surface, earth conductive film 3 on the lower surface and electrooptical dielectric layer 4 under the earth conductive film 3; the polar direction of electrooptical dielectric layer 4 and beam transmission parallels the normal direction of earth conductive film 3; the electrooptical signal of electrooptical probe can calibrate the voltage signal amplitude in the corresponding circuit, which reinforces the electrooptical detecting technique appliance of specialty detection and circuit fault diagnosis; the electrooptical probe possesses higher voltage sensibility and higher spatial distinguishability of electric field distribution, which prevents the circuit working condition from observable interference and adjacent signal line from electrooptical serial signal.

Description

technical field [0001] The invention belongs to a device for integrated circuit detection, in particular to a detector for nondestructively detecting voltage signals in microstrip transmission lines in integrated circuits by using electro-optical effects. Background technique [0002] In order to increase the integration and operating speed of integrated circuits, efforts are being made to reduce the size of devices in integrated circuit chips. In the development process of this high-speed large-scale integrated circuit, problems such as leakage, thermal effects, parasitic parameter effects in circuit chips, and uncertainty of device model parameters have become obstacles to further improving the yield and reliability of device chips. As we all know, it is impossible for a device with a low yield rate to improve its reliability through a simple screening process; a highly reliable device is manufactured with a highly reliable design and a highly reliable process. Therefore,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/00G01R31/02G01R31/08G01R31/28G01R19/00
CPCY04S10/52
Inventor 衣茂斌刘鸿飞杨罕刘少林孙洪波陈岐岱
Owner JILIN UNIV
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