Radiation-sensitive resin composition for spacer, spacer and method for forming the same
A technology of curable resins and compositions, applied in nonlinear optics, instruments, optics, etc., can solve the problems of difficult control of sintering conditions, disordered box gaps, and pollution of ovens, etc., and achieve excellent compressive strength, excellent friction resistance, and good The effect of molten shapes
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[0423] Hereinafter, the present invention will be more specifically described by illustrating synthesis examples and examples, but the present invention is not limited to the following examples.
[0424] The gel permeation chromatography of the polymers synthesized in the following polymer synthesis examples was measured under the following conditions, and the polystyrene-equivalent weight average molecular weight (Mw) and number average molecular weight (Mn) were determined.
[0425] Device: GPC-101 (manufactured by Showa Denko Co., Ltd.)
[0426] Column: Connect GPC-KF-801, GPC-KF-802, GPC-KF-803, and GPC-KF-804 (manufactured by Showa Denko Co., Ltd.) in series
[0427] Mobile phase: tetrahydrofuran containing 0.5% by weight phosphoric acid
[0428] (1) Preparation and evaluation of the first composition
Synthetic example 1
[0431] Add 2 parts by weight of 2,2'-azobisisobutyronitrile, 3 parts by weight of the compound represented by the above formula (T-1) as a molecular weight control agent and diethylene glycol diethylene glycol in a flask with a condenser tube and a stirrer. 200 parts by weight of methyl ether, then add 20 parts by weight of styrene, 17 parts by weight of methacrylic acid, tricyclic [5.2.1.0 2,6 ] 18 parts by weight of decane-8-yl methacrylate and 45 parts by weight of glycidyl methacrylate, after nitrogen replacement, while stirring slowly, the temperature of the reaction solution was raised to 80°C, and the temperature was kept for polymerization for 6 hours . Then, the temperature of the reaction solution was raised to 100° C., 1 part by weight of 2,2′-azobisisobutyronitrile was added, followed by polymerization for 1 hour, thereby obtaining the polymers (A-1) shown in Table 1. solution. The Mw of the obtained polymer (A-1) was 11,000, and Mw / Mn was 1.4. In addition, the ...
Synthetic example 2~20
[0433] The same procedure as in Synthesis Example 1 was performed except that the compound represented by the above formula (T-1) as a molecular weight control agent was replaced with a substance of the type shown in Table 1 in the amount shown in Table 1. Table 1 shows the Mw and Mw / Mn of the polymers obtained in each synthesis example and the solid content concentration of each polymer solution.
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