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Preparation method of magnetism remotely-controlled drive microstructure

A microstructure and magnetic technology, which is applied in the field of preparation of magnetic remote control driven microstructures, can solve problems such as difficult biocompatible remote operation methods

Inactive Publication Date: 2011-06-01
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the advancement of science and technology has put forward higher requirements for the materials and performance of microstructure devices, some of which cannot be met by Si-MEMS technology, such as the difficulty in achieving biocompatibility in silicon materials and the remote operation of magnetically driven microstructures, etc.

Method used

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  • Preparation method of magnetism remotely-controlled drive microstructure
  • Preparation method of magnetism remotely-controlled drive microstructure
  • Preparation method of magnetism remotely-controlled drive microstructure

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0044] (1) Preparation of magnetic nanomaterials. Preparation of Fe by Chemical Co-precipitation 3 o 4 - Oleic acid magnetic nanomaterials. 5.38g FeCl 3 .6H 2 O was dissolved in 200ml deionized water, and 1.98g FeCl was added under nitrogen protection 2 .4H 2 O. Under electric stirring, 7 ml of ammonia water with a concentration of 8% was quickly added. After stirring for 3 hours, the temperature of the oil bath was raised to 80° C., 1.22 g of oleic acid was added dropwise, and the reaction was completed for 30 minutes after the dropwise addition. Utilize magnet adsorption, wash three times with deionized water, dry, obtain 2.54g product, the X-ray diffraction data shown in Fig. 2, infrared transmission spectrum prove that product is Fe 3 o 4 - Oleic acid magnetic nanomaterials, transmission electron microscope pictures show that the particle size of the nanoparticles is about 15nm.

[0045] (2) Preparation of magnetic photoresist. Will Fe 3 o 4 - Oleic acid magnet...

Embodiment 2

[0052] (1) Preparation of magnetic nanomaterials. Preparation of Fe by High Temperature Pyrolysis 3 o 4 Magnetic nanomaterials as core, oleic acid and oleylamine as surface modification materials. 2mmol precursor iron triacetylacetonate Fe(acac) in the there-necked flask 3 Dissolve 10mmol reducing agent 1,2-hexadecanediol in 20ml phenetole ether solvent, add 6mmol oleic acid and 6mmol oleylamine at the same time, pass nitrogen gas for 30 minutes under magnetic stirring, heat to 200°C for 30 minutes, then heat to 250°C ℃ for another 30 minutes, centrifuged and washed to obtain the product. The X-ray diffraction data and infrared transmission spectrum shown in Figure 4 prove that the product is Fe 3 o 4 - Oleic acid and oleylamine magnetic nanomaterials, the transmission electron microscope pictures show that the particle size of the nanoparticles is about 6nm.

[0053] (2) Fe 3 o 4 -Oleic acid, oleylamine magnetic nanomaterial with photoinitiator L369 and BPO, MA, resin...

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Abstract

The present invention belongs to the micro electromechanical field, and in particular relates to a method utilizing 3D laser processing technology to prepare magnetic remote control driven microstructures. Magnetic materials are first synthesized by utilizing a physical or chemical method; and then the magnetic materials are mixed jointly with a photosensitive polymeric material system to preparemagnetic photoresist; the magnetic photoresist is scanned point by point by utilizing a laser 3D processing system put up; a magnetic remote control driven microstructure can be gained after development. The microstructure prepared fully utilizes the preparation technology and magnetic property of various magnetic materials, organically combines the laser processing technology with magnetic functional materials, breaks through the limitation that the prior laser polymeric material only plays a role in structural support, and then utilizes ferromagnet or electromagnet to realize the microstructure driving. The most important characteristics of the present invention are that: the driving mode is simple, easy to operate, contactless and remote controllable; the preparation process is not limited by the shapes of the microstructures and can process arbitrary 3D structures including curved surfaces.

Description

technical field [0001] The invention relates to the field of micro-electromechanical devices, in particular to a preparation method of a magnetic remote-controlled driving microstructure. Background technique [0002] Since the advent of microstructure devices, they have attracted widespread attention from all over the world. Due to their advantages such as small size, high precision, light weight, low energy consumption, high sensitivity and high work efficiency, they are widely used in national defense, industry, aerospace, biology, medicine and other fields. It has broad application prospects, and related researches are advancing by leaps and bounds. [0003] Realizing the driving of microstructure devices is an important part of obtaining a complete MEMS. The principle is to convert other forms of energy (electricity, heat, light, etc.) into mechanical energy, which can realize output such as force, torque, displacement or Change of state, microswitches, microactuators,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00B81C99/00G03F7/20H01F1/04G03F7/004G03F7/32G03F7/028
Inventor 孙洪波夏虹陈岐岱高炳荣
Owner JILIN UNIV