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Nano-stack TiN gradient film and preparation thereof

A nano-lamination and gradient film technology, which is applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of easy cracking of TiN ion plating coating, so as to improve the phenomenon of easy cracking and peeling, and suppress cracking Generates and expands, enhances wear-resistant effects

Inactive Publication Date: 2008-11-05
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to provide a method for preparing a nano-laminated TiN gradient film that can improve the bonding strength of the film base and inhibit the generation and expansion of cracks, so as to solve the problem of surface wear resistance of parts such as automobile engine valves when the working temperature is lower than 600 ° C. The problem of corrosion resistance and protection, and the problem of easy cracking of conventional TiN ion plating coating

Method used

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  • Nano-stack TiN gradient film and preparation thereof
  • Nano-stack TiN gradient film and preparation thereof
  • Nano-stack TiN gradient film and preparation thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] After removing oil stains on the surface and ultrasonic cleaning in trichloroethylene organic solvent for 5-10 minutes, the TiAl valve is taken out and installed on a special fixture and placed in the vacuum chamber of the ion plating equipment, vacuumed to 0.005Pa, and then the workpiece Heat to about 450°C; after the vacuum chamber is heated for 30 minutes, pass high-purity argon to the vacuum chamber to a pressure of about 2Pa, apply a negative bias of about 600 volts to the workpiece, and perform ion bombardment cleaning for about ten minutes; select a time period of 4 minutes , The evaporation source beam flow is 230-300A, the workpiece is applied with a negative bias of about 80-140 volts, high-purity nitrogen is introduced and the nitrogen flow rate is gradually adjusted from 0 to 80 ml / min during the cycle time, and then the nitrogen flow rate is adjusted from 80 ml / min. The minute gradually reaches 0, and the deposition time is 50 minutes. Thus, a nano-layered TiN ...

Embodiment 2

[0038] The difference from Example 1 lies in:

[0039] After removing oil stains on the surface and ultrasonic cleaning in trichloroethylene organic solvent for 10 minutes, the TiAl valve is taken out and installed on a special fixture and placed in the vacuum chamber of the ion coating equipment, evacuated to 0.008Pa, and then the workpiece is heated to About 400℃; after heating and holding the vacuum chamber for 30 minutes, pass high-purity argon to the vacuum chamber to a pressure of about 2Pa, apply a negative bias of about 500 volts to the workpiece, and perform ion bombardment cleaning for about 5 minutes; select time period T = 5 minutes , The evaporation source beam is 200-270A, the workpiece is applied with a negative bias of about 120-180 volts, high-purity nitrogen is introduced and the nitrogen flow is gradually adjusted from 0 to 100 ml / min during the cycle, and then the nitrogen flow is adjusted from 100 ml / min. The minute gradually reaches 0, and the deposition time...

Embodiment 3

[0042] The difference from Example 1 lies in:

[0043] After removing oil stains on the surface and ultrasonic cleaning in trichloroethylene organic solvent for 10 minutes, the TiAl valve is taken out and installed on a special fixture and placed in the vacuum chamber of the ion plating equipment, evacuated to 0.013 Pa, and then heated to About 350°C; after heating and holding the vacuum chamber for 30 minutes, pass high-purity argon to the vacuum chamber to a pressure of about 2Pa, apply a negative bias of about 400 volts to the workpiece, and perform ion bombardment cleaning for about 8 minutes; select time period T = 2 minutes , The evaporation source beam flow is 280-350A, the workpiece is applied with a negative bias of about 140-200 volts, and high-purity nitrogen is introduced. The nitrogen flow rate is gradually adjusted from 0 to 150 ml / min in the cycle time, and then the nitrogen flow rate is adjusted from 150 ml / min. Gradually to 0, the deposition time is 120 minutes. T...

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Abstract

The invention relates to an ion plating technique, in particular to a nano laminated TiN gradient film and a preparation method thereof, which solves the problems that superficial wear resistance and corrosion resistance of parts such as automobile engine valves and plane blades that work at the temperature lower than 600 DEG C and are composed of high-temperature alloys, as well as the problem that plating layers of normal TiN ion plating films are easy to crack. The invention utilizes the ion plating technique for depositing the nano laminated TiN gradient film on the surface of the high-temperature alloy. The preparation method of the nano laminated TiN gradient film comprises following steps: firstly, oil stains on the surface of the alloy are removed and the alloy is ultrasonically cleaned in an organic solvent; secondly, a model that is cleaned is loaded and clamped on a clamping fixture and placed into a vacuum chamber of an ion plating device, and after the vacuum chamber is vacuumized into a required vacuum degree and heated to a certain temperature, argon is let into the vacuum chamber so as to implement ion bombardment cleaning; finally, by adjusting the changes of beam current of an evaporator source, negative bias voltage and nitrogen flow rate in a plating process, the nano laminated TiN gradient film with good inhibiting performance of plating layer cracks is obtained, the thickness of each layer of the nano laminated TiN gradient film is 50 to 100 nanometers, and the total thickness of the plating film can be adjusted in a range between 1.5 to 3.6 micrometers.

Description

Technical field: [0001] The invention relates to ion plating technology, in particular to a nano-laminated TiN gradient film capable of improving the bonding strength of the film base and inhibiting the generation and expansion of cracks, and a preparation method and application thereof. It can be used as a working temperature lower than 600°C and is made of a high-temperature alloy. Wear-resistant and corrosion-resistant protective coatings for automobile engine valves, aircraft blades and other parts have been applied. Background technique: [0002] The valve of an automobile engine is one of the most important components, which determines the performance of the engine to a large extent. The working environment is also quite harsh, so the valve material selection and preparation processing and the final surface treatment technology have high requirements. A special requirement for the air valve is light weight, and the inertia of lighter parts is small, which can improve maneuv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/32C23C14/54
Inventor 于志明饶光斌徐家寅柯伟李依依
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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