Composite synchronous superaudio vibrating micro electrolytic machining method

Abstract

The invention discloses a complex synchronous ultrasonic vibration micro-electrolytic machining method. A micro pressure adjustment device is used to keep the micro pressure contact of workpieces with the micro cathode; a micro displacement laser sensor is used for rapid dynamic measurement of the location of the ultrasonic vibrations, and to convert the vibrations into electrical signals carrying ultrasonic frequencies, phases and amplitudes, then the signals are transmitted to a chopper circuit for processing and conversion to produce chopping signals to turn on and shut off the electrolytic power source, thus achieving the synchronization of the electrolytic electrification and ultrasonic vibration of the cathode; a current sensor converts electrolytic signals into voltage signals, which are displayed, measured and storage by a digital storage oscillograph and then are transmitted to a control computer for automatic adjustment of the ultrasonic parameters and the electrical parameter. The method reasonably combines micro electrolysis with ultrasonic vibration in synchronization and in the same frequency, and eliminates passivation of the electrolysis through the function of ultrasonic vibration, thus improving accuracy of the machining and the quality of the surface and reducing the cost; and the invention can achieve micro machining of micro-structures of any type.

Description

technical field [0001] The invention relates to a compound synchronous ultrasonic frequency vibration micro-electrolytic machining method, which belongs to the technical field of compound micro-special processing. Background technique [0002] In the field of micro-special processing technology, there are many processing methods, such as micro-EDM, micro-electrolytic machining, micro-ultrasonic machining, micro-high-energy beam processing, and micro-compound machining composed of two or more processing methods. These processing methods can solve the precision and micro-machining problems that are difficult to achieve in ordinary cutting, and play an important role in the micro-finishing of parts. However, the existing microfabrication methods have certain limitations while each has its own advantages. [0003] Micro-ultrasonic machining is especially suitable for micro-hole and groove machining of non-metallic hard and brittle materials. It has the characteristics of high e...

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Problems solved by technology

This patent is mainly used for the high-precision groove processing of dynamic pressure bearings. The application range is limited, and it is difficult to realize the micro-machining of microstructure and arbitrary shape parts; Simultaneous organic compounding, the compounding effect is not fully exerted

[0007] Chinese invention patent application "CN200610037902.8" discloses an ultrasonic electrolysis composite micromachining method, which takes ultrasonic frequency electrical signals and generates electrolytic power chopping signals through a modulation circuit. Due to the lagging action of the ultrasonic vibration mechanical system, it is difficult to effectively guarantee the composite synchronization accuracy , without synchronous hysteresis error accumulation, electrolytic power-on phase disorder will occur in the process of processing, electrolysis or electrolytic short circuit will occur in continuous large gaps, and in severe cases, the cathode and workpiece will be damaged, and this hysteresis error is difficult to realize through the modulation circuit Real-time compensation; in order to avoid electrolytic short circuit and spark discharge burn workpiece and cathode, in practice, it is necessary to mix ultrasonic abrasive grains with larger particle size in the processing electrolyte to prevent electrolytic short circuit caused by direct contact between workpiece and cathode, but ultrasonic abrasive can eliminate blunt At the same time, it will inevitably cause wear to the cathode of the tool, which limits the service life of the cathode in micromachining. In micromachining with a large depth-to-diameter ratio, it is difficult to meet the micromachining precision requirements.

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