Titanium dioxide nano-pore array thin film and preparation thereof

Abstract

The invention discloses a titanium dioxide nanometer hole array film and a preparation method thereof. A hole in the film is an ordered through hole array; the diameter of the through hole thereof is 15 to 130 nm, the hole pitch thereof is 25 to 200 nm, and the porosity thereof is 30 to 40 percent; the thickness of the film is 10 to 1000 nm; the preparation method comprises the following steps: step 1, obtaining a porous aluminum oxide template with the hole diameter of 20 to 150 nm by using the secondary oxidation process; step 2, preparing precursor solution by using absolute ethyl alcohol, glacial acetic acid, butyl titanate and water, then adding polyethylene glycol into the precursor solution after the pH value of the precursor solution is adjusted to 2 to 3 by using nitric acid, and finally obtaining precursor sol; and step 3, firstly coating the precursor sol on the porous aluminum oxide template for at least one time and thermally insulating and drying the precursor sol for at least one time, then placing the aluminum oxide template coated with the precursor sol after being annealed into strong alkaline solution to corrupt the porous aluminum oxide template, and finally preparing the titanium dioxide nanometer-hole array film. The invention can be widely applied to the fields of sensors, catalysis, photo catalysis, photonic crystal, etc.

Description

technical field [0001] The invention relates to a nanohole array film and a preparation method thereof, in particular to a titanium dioxide nanohole array film and a preparation method thereof. Background technique [0002] Titanium dioxide is a wide bandgap semiconductor that plays a very important role in our lives. With people's increasing concern in cleanliness, energy, sensor devices, etc., its excellent catalytic and photocatalytic properties and its application in dye-sensitized solar cells have attracted more and more attention. Oxide semiconductor nanofilms with hole array structure have become more and more research hotspots because of their large specific surface area and excellent properties in various aspects. Many properties of titanium dioxide are directly related to its specific surface area. The specific surface area of ​​titanium dioxide film with a pore array structure is much larger than that of conventional films. Due to its periodic pore array structur...

AI Technical Summary

Problems solved by technology

However, there are deficiencies in both the manufacturing method and the finished product. First, it is impossible to produce a titanium dioxide film with an ordered hole array, especially a large-area ordered hole array titanium dioxide film; The pore diameter and pore spacing in the porous titanium dioxide film are random, determined by the porous particles of the template, and cannot be effectively controlled artificially

Although there is also anodic oxidation method used to prepare alumina porous templates, filled with sol-gel and removed after heat treatment to obtain titanium dioxide porous arrays, such as "preparation of One-dimensionally oriented nano-TiO2 tubular film method” mentioned in the article, however, the technical solutions for actually making ordered pore array TiO2 films have not been disclosed, especially related to the pore diameter and porosity of TiO2 porous array films. The formulation and effective control of the thickness of the film and its process parameters all need people to explore again; the second is that the disclosed method is only for the preparation of nano-titanium dioxide tubular crystal film, and it cannot be used to prepare titanium dioxide film with ordered hole arrays. , and also has the defects of complicated process, many raw materials used, energy consumption and time-consuming

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