Method for manufacturing low-offset flat band voltage SiC MOS capacitor
A manufacturing method and flat-band voltage technology, applied in the field of microelectronics, can solve problems such as difficult nitrogen-containing gas dosage, influence on device interface characteristics, large flat-band voltage offset, etc., to reduce dangling bonds, reduce near-interface trap density, The effect of small flat-band voltage excursions
Inactive Publication Date: 2009-09-23
XIDIAN UNIV
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Abstract
The invention discloses a method for manufacturing a low-offset flat band voltage SiC MOS capacitor, which mainly solves the problem that the trap intensity of a SiC/SiO2 interface is too high. The method comprises the following manufacturing processes: cleaning an N-SiC epitaxy material; after injecting N<+> into a SiC epitaxy layer by ion injection, injecting Al<-> into the epitaxy layer; oxidizing a layer of SiO2 on the epitaxy layer after the ion injection in the mode of dry-oxygen; sequentially finishing the annealing in Ar gas environment, the wet-oxygen oxidation annealing in wet-oxygen environment and the cold treatment in the Ar gas environment of an oxidized sample wafer; depositing a layer of SiO2 on the sample wafer after the cold treatment by chemical vapor deposition and first annealing the sample wafer in the Ar gas environment; and manufacturing an electrode by vacuum sputtering of Al and carrying out second annealing in the Ar gas environment so as to finish manufacturing the whole capacitor. The invention has the advantages of accurate control of N<+>\Al<-> doses, low trap intensity of the SiC/SiO2 interface, small flat band voltage offset of the SiC MOS capacitor and simple achieving process and can be used for improving the characteristics of the SiC/SiO2 interface of an N type SiC MOS device.
Application Domain
Semiconductor/solid-state device manufacturing
Technology Topic
PhysicsLow offset +12
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PUM
Property | Measurement | Unit |
Thickness | 20.0 ~ 35.0 | nm |
Thickness | 20.0 | nm |
Diameter | 900.0 | µm |
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