Method for manufacturing low-offset flat band voltage SiC MOS capacitor
A manufacturing method and flat-band voltage technology, applied in the field of microelectronics, can solve problems such as difficult nitrogen-containing gas dosage, influence on device interface characteristics, large flat-band voltage offset, etc., to reduce dangling bonds, reduce near-interface trap density, The effect of small flat-band voltage excursions
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Example Embodiment
[0020] Embodiment 1, including the following steps:
[0021] Step 1. First use deionized water to ultrasonically clean the N-SiC epitaxial material, then use concentrated sulfuric acid to clean, and heat to smoke, boil for 10 minutes, soak for 30 minutes, and rinse the surface with deionized water several times; then use a ratio of 5 :1:1 H 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath for 5 minutes at a temperature of 80°C, and rinse the surface with ionized water several times after cleaning with hydrogen fluoride solution; then use the 6:1:1 ratio of H 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath of No. 2 mixed liquid with HCl for 5 minutes at a temperature of 80°C. After cleaning with a hydrogen fluoride solution, rinse the surface with ionized water several times; finally, use an infrared lamp to dry it.
[0022] Step 2. Perform N on the cleaned epitaxial layer + Ion implantation, the ion implantation energy is 2.5kev, and the dose is 2.0×10...
Example Embodiment
[0027] Embodiment 2, including the following steps:
[0028] Step 1. First use deionized water to ultrasonically clean the N-SiC epitaxial material, then use concentrated sulfuric acid to clean, and heat to smoke, boil for 10 minutes, soak for 30 minutes, and rinse the surface with deionized water several times; then use the ratio of 5:1:1 H 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath for 5 minutes at a temperature of 80°C, and wash the surface with ionized water several times with ionized water at a temperature of 80°C. 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath of No. 2 mixed liquid with HCl for 5 minutes at a temperature of 80°C. After cleaning with hydrogen fluoride solution, rinse the surface with ionized water several times; finally, it is dried by infrared light.
[0029] Step 2. Perform N on the cleaned epitaxial layer + Ion implantation, the ion implantation energy is 3.0kev, and the dose is 2.2×10 12 cm -2 ; Then perform Al on the s...
Example Embodiment
[0034] Embodiment 3 includes the following steps:
[0035] Step 1. Use deionized water to ultrasonically clean the N-SiC epitaxial material, then use concentrated sulfuric acid to clean, and heat to smoke, boil for 10 minutes, soak for 30 minutes, and rinse the surface with deionized water several times; then use a ratio of 5 :1:1 H 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath for 5 minutes at a temperature of 80°C, and wash the surface with ionized water several times after cleaning with hydrogen fluoride solution; then use a 6:1:1 ratio of H 2 O, H 2 O 2 Soak the N-SiC epitaxial material in a water bath of No. 2 mixed liquid with HCl at a temperature of 80°C for 5 minutes. After cleaning with hydrogen fluoride solution, rinse the surface with ionized water several times; finally, it is dried by infrared light.
[0036] Step 2. Perform N on the cleaned epitaxial layer + Ion implantation, the ion implantation energy is 4.8kev, and the dose is 3.2×10 12 cm -2 ; Th...
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