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Method for preparing texture-controllable lead magnesium niobate-lead titanate ferroelectric thin film

A lead magnesium niobate and ferroelectric thin film technology is applied in the field of preparation of lead magnesium niobate-lead titanate ferroelectric thin films, and can solve the problem of poor density and poor texture of lead magnesium niobate-lead titanate ferroelectric thin films. control issues

Inactive Publication Date: 2009-10-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of uncontrollable texture and poor density of lead magnesium niobate-lead titanate ferroelectric film prepared in the prior art. The present invention provides a sol-gel method of an improved heat treatment process, Fabrication of texture-controllable lead magnesium niobate-lead titanate ferroelectric thin films

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  • Method for preparing texture-controllable lead magnesium niobate-lead titanate ferroelectric thin film
  • Method for preparing texture-controllable lead magnesium niobate-lead titanate ferroelectric thin film
  • Method for preparing texture-controllable lead magnesium niobate-lead titanate ferroelectric thin film

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specific Embodiment approach 1

[0010] Specific embodiment one: the method steps of the present embodiment preparation texture controllable lead magnesium niobate-lead titanate ferroelectric thin film are as follows: a, according to chemical formula (1-x)Pb(Mg 1 / 3 Nb 2 / 3 )-xPbTiO 3 Weigh lead acetate, magnesium acetate, niobium ethoxide and tetrabutyl titanate respectively according to the molar ratio of 1:1 / 3(1-x):2 / 3(1-x):x, wherein 01 / 3 Nb 2 / 3 )-xPbTiO 3 sol; e, the substrate was ultrasonically treated in acetone and absolute ethanol for 4 to 6 minutes, and then placed in the air to dry naturally; f, the (1-x)Pb(Mg 1 / 3 Nb 2 / 3 )-xPbTiO 3 The sol is added dropwise on the substrate treated in step e, spin-coated at 1000-2000r / min for 10s, then spin-coated at 3500-4500r / min for 20s, and then dried at 40-80°C to obtain film D; g, Pre-fire film D at 300-500°C to obtain film E; h. Put film E in a rapid heat treatment furnace and bake at 630-670°C for 8-15 minutes, then cool to room temperature to obtain tex...

specific Embodiment approach 2

[0012] Embodiment 2: This embodiment differs from Embodiment 1 in that x=0.2˜0.6 in step a. Other steps and parameters are the same as those in Embodiment 1.

specific Embodiment approach 3

[0013] Embodiment 3: This embodiment differs from Embodiment 1 in that x=0.32 in step a. Other steps and parameters are the same as those in Embodiment 1.

[0014] The texture-controllable lead magnesium niobate-lead titanate ferroelectric film obtained in this embodiment is characterized by AFM surface morphology, and the two-dimensional and three-dimensional AFM spectra of the film are as follows figure 2 with image 3 As shown, it can be seen from the AFM spectrum that the surface roughness of the obtained film is low, only 3.08nm. In this embodiment, the surface morphology of the lead magnesium niobate-lead titanate ferroelectric film with controllable texture is characterized by SEM, as shown in Figure 4 It can be seen from the figure that the film thickness is uniform, and there is no crack on the surface, and the compactness is good.

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Abstract

A method for preparing texture-controllable lead magnesium niobate-lead titanate ferroelectric thin film relates to a method for preparing lead magnesium niobate-lead titanate ferroelectric thin film. The invention settles the problems of uncontrollable texture and low density in the prior art for preparing lead magnesium niobate-lead titanate ferroelectric thin film. According to the method of the invention, lead acetate is dissolved into a mixed solution of glacial acetic acid and ethylene glycol monomethylether for obtaining a solution A. Then the mixture of magnesium acetate and niobium ethoxide is dissolved into the mixed solution of glacial acetic acid and ethylene glycol monomethylether for obtaining a solution B. Then tetrabutyl titanate is added into the solution B for obtaining a solution C. Finally the solution A and the solution C is mixed and added with stabilizing agent for obtaining PMN-PT precursor sol. Then a spin coater is used for coating the precursor sol on a substrate. The substrate is prebaked after drying. Then the substrate is placed into a fast heat treatment furnace for calcining. Afterwards the substrate is cooled to room temperature. Then the texture-controllable PMN-PT ferroelectric thin film is obtained. The lead magnesium niobate-lead titanate ferroelectric thin film obtained by the invention has the advantages of controllable structure and high density.

Description

technical field [0001] The invention relates to a preparation method of a lead magnesium niobate-lead titanate ferroelectric thin film. Background technique [0002] Relaxor ferroelectric thin films have the characteristics of high dielectric constant, high temperature stability and small size, which have significant advantages in realizing the miniaturization of integrated circuits. Therefore, the research and development of relaxor ferroelectric thin films have been paid more and more attention. Lead magnesium niobate-lead titanate (PMN-PT) ceramic system is a representative relaxor ferroelectric material with important dielectric, piezoelectric and electrostrictive properties. [0003] For PMN-based materials, because of their complex components, especially PMN-based materials are very sensitive to the accuracy of the stoichiometric ratio and the uniformity of the composition, so the sol-gel method that can well control the stoichiometric ratio is the best choice . At ...

Claims

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Application Information

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IPC IPC(8): C04B41/50C04B35/499C04B35/472
Inventor 冯明周玉王文贾德昌
Owner HARBIN INST OF TECH
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