Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof

A deep submicron and manufacturing method technology, applied in the direction of microstructure technology, microstructure devices, chemical instruments and methods, etc., can solve the problems of difficult processing of micro-convex structures, increase in the thickness of the dielectric layer, and reduce the driving voltage, etc., so as to facilitate mass production The effect of making, reducing the driving voltage, and reducing the resistance

Inactive Publication Date: 2009-10-21
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

(Patent "A low-voltage micro-droplet control device", application number 200410057319.4) However, the micro-convex structure increases the thickness of the dielectric layer while enhancing the surface hydrophobicity, which easily offsets the effect of reducing the driving voltage
In addition, the submicron and millimeter-scale micro-convex structures are difficult to process, have poor insulation performance, and are difficult to achieve mass production

Method used

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  • Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof
  • Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof
  • Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof

Examples

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Embodiment 1

[0020] Example 1: Micro-droplet driver with deep submicron pore structure of unipolar plate structure.

[0021] This embodiment adopts the structure shown in Figure 1(b), in which a layer of thermally oxidized SiO 2 The Si sheet is used as the substrate material, TiW / Au is used as the driving electrode, the SiN thin film of PECVD is used as the dielectric layer, and the deep submicron pore structure and low surface energy fluorocarbon polymer composite film prepared by Al anodic oxidation are used as the hydrophobic film layer. . The electrodes are 1mm×1mm square, the distance between the electrodes is 30μm, the electrodes are arranged regularly, and each electrode can be controlled individually. The chips operate directly in an air atmosphere.

[0022] The specific production process is as follows:

[0023] (1) Use ordinary single-polishing (100) silicon wafers with a thickness of 450 μm, clean and oxidize 1 μm.

[0024] (2) Sputter TiW with a thickness of 50nm and gold w...

Embodiment 2

[0030] Example 2: Micro-droplet driver with deep submicron pore structure of bipolar plate structure.

[0031] This embodiment adopts the structure shown in FIG. 1( a ), and the manufacturing process and flow of the lower plate are exactly the same as those in Embodiment 1. The upper plate uses glass (Pyrex7740) as the substrate, transparent indium tin oxide (ITO) as the reference electrode layer, the thickness of the reference electrode layer is between 200nm and 1μm, and the deep submicron pore structure prepared by Al anodic oxidation And low surface energy fluorocarbon polymer composite membrane as the hydrophobic membrane layer. The support structure can be made of photoresist or double-sided tape, and the upper and lower plates can be assembled after being aligned through the support structure.

[0032]The manufacturing process of the upper plate and the supporting structure is as follows: first, a 500nm-thick ITO layer is prepared on the Pyrex7740 glass substrate by va...

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Abstract

The invention relates to a digital micro-droplet drive with deep submicron pore structure and a manufacturing method thereof. The invention is characterized in that the digital droplet drive comprises two structures of a bipolar plate and a monopolar plate. The lower polar plate of the structure of the bipolar plate is composed of an insulating substrate, a driving electrode array, a dielectric layer, a deep submicron pore structure and a hydrophobic film layer. The upper polar plate comprises an insulating base plate, a reference electrode layer, a deep submicron pore structure and a hydrophobic film layer. The upper polar plate and the lower polar plate are connected by a supporting structure. The driving electrodes are uniformly distributed on the insulating substrate in the shape of an array, the dielectric layer is coated on the driving electrode array, and the deep submicron pore structures and the hydrophobic film layers form a super-hydrophobic film layer that is coated on the dielectric layer. The structures of the lower polar plates in the monopolar plate structure and the bipolar plate structure are the same. The invention uses the deep submicron pore structures to effectively enhance the hydrophobic properties of the hydrophobic film layers, effectively reducing the thickness of the structure and reducing driving voltage.

Description

technical field [0001] The invention relates to a digital micro-droplet driver with a deep submicron pore structure and a manufacturing method, belonging to the technical field of micro-electromechanical systems and micro-total analysis systems. technical background [0002] Lab-On-Chip (LOC) is a concept of biochemical analysis proposed by Manz et al. in the early 1990s. A method of completing different biological or chemical reaction processes and analyzing their products on a chip of several square centimeters. Due to the characteristics of miniaturization, automation, integration and portability, LOC has developed rapidly in recent years, showing good application prospects in biological detection and medical diagnosis. [0003] As the most critical part of the LOC, the microfluidic chip is an important part of the sample preparation, transportation, separation and other operations. The early microfluidic chip research was based on the continuous flow form of the microp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81C1/00B81C3/00B81C5/00G01N33/50B81C99/00
Inventor 李铁皋华敏刘翔周萍王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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