Preparation method of chromium-aluminum-nitrogen film by closed field unbalanced magnetron sputtering

A technology of magnetron sputtering and chromium aluminum nitrogen, which is applied in the direction of sputtering plating, ion implantation plating, metal material coating technology, etc., and can solve problems such as unstable technical parameters and unbalanced film thickness
CN101575696AInactive Publication Date: 2009-11-11TAIYUAN UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
TAIYUAN UNIV OF TECH
Publication Date
2009-11-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a preparation method of a chromium-aluminum-nitrogen film by closed field unbalanced magnetron sputtering, which comprises the following steps: a chromium-tungsten-manganese steel plate is taken as a basal body, chromium and aluminum as a target source of metal ion, nitrogen gas as reactant gas, and argon gas as ion bombardment gas and protection gas; in a vacuum sputtering furnace, in a closed magnetic field state, in the argon gas and at the temperature of 300 DEG C, the surface of the chromium-tungsten-manganese steel plate is sputtered with chromium ion, aluminum ion and nitrogen ion and the chromium-aluminum-nitrogen hard film is formed on the surface of the steel plate, and then the low temperature tempering and alloying solid solution are conducted, thus greatly improving mechanical property, hardness, intensity, abrasive resistance and erosion resistance of the surface of the chromium-tungsten-manganese steel plate. The mechanical property of the chromium-tungsten-manganese steel plate can be improved by 466% compared with that of hardened steel plates. The preparation method has short process flow, precise technique, accurate and detailed measurement values, the film with thickness of 4,600nm, and the alloy layer with good solid solution effect and being not easy to peel off, thus being the ideal treatment method for strengthening and hardening the surface of alloy tool steel.
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Description

technical field

[0001] The invention relates to a method for preparing a chromium-aluminum-nitrogen thin film by closed-field unbalanced magnetron sputtering, which belongs to the technical field of surface coating and application of high-strength and high-hardness materials. Background technique

[0002] In the field of machinery manufacturing industry, a large number of metal materials are used. Due to different uses and requirements, the processing of materials is also different. For example, tools with high strength and high hardness and mechanical parts that are wear-resistant and corrosion-resistant require Strengthen and harden it.

[0003] There are also many ways to strengthen and harden tools, molds and mechanical parts, such as surface alloying, infiltrating nickel, chromium, molybdenum, silicon and other elements on the surface of metal materials to enhance their strength and hardness; such as heat treatment, Change the internal metallographic structure of the m...

Claims

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