Self-lubricating antifriction composite thin film based on MoS2-TiC-C and preparation method thereof

A technology of mos2-tic-c and composite thin film is applied in the field of materials in the field of nano-processing technology to achieve the effects of enhancing bonding strength, inhibiting oxidation, and expanding the scope of use

Inactive Publication Date: 2010-12-22
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Existing literature and patent searches did not find Ar-CH 4 MoS in atmosphere 2 Co-sputterin

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Polish the stainless steel substrate to a smoothness of less than 0.01 μm, clean it with alcohol and acetone in an ultrasonic cleaner, dry it, and put it into the sputtering chamber. Vacuum to 10 -4 Pa, enter argon gas, adjust the pressure in the vacuum chamber to 1Pa, turn on the power, DC sputter Ti or Ni target, the thickness is about 100nm, the sputtering power is 100W, the working pressure is 1Pa, the sputtering time is about 15min, then turn off the power. Introduce a certain amount of mixed gas of argon and methane, adjust the gas flow meter so that the air pressure in the sputtering chamber is 0.8Pa, and the content of methane is 15%, turn on the power, and use radio frequency sputtering MoS 2 Target, power 150W, DC sputtering titanium target, power 10W, working pressure 0.8Pa, sputtering time 60 minutes, turn off the power, after the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to make a film thickness of about 0.6μm fil...

Embodiment 2

[0024] Polish the stainless steel substrate to a smoothness of less than 0.01 μm, clean it with alcohol and acetone in an ultrasonic cleaner, dry it, and put it into the sputtering chamber. Vacuum to 10 -4 Pa, enter argon gas, adjust the pressure in the vacuum chamber to 1Pa, turn on the power, DC sputter Ti or Ni target, the thickness is about 100nm, the sputtering power is 100W, the working pressure is 1Pa, the sputtering time is about 15min, then turn off the power. Introduce a certain amount of mixed gas of argon and methane, adjust the gas flowmeter so that the air pressure in the sputtering chamber is 1.2Pa, and the content of methane is 15%, turn on the power, and use radio frequency sputtering MoS 2 Target, power 200W, DC sputtering Ti target, power 15W, working pressure 1.2Pa, sputtering time 90 minutes, turn off the power, after the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to make a film with a thickness of about 1.3μm fil...

Embodiment 3

[0026] Polish the stainless steel substrate to a smoothness of less than 0.01 μm, clean it with alcohol and acetone in an ultrasonic cleaner, dry it, and put it into the sputtering chamber. Vacuum to 10 -4 Pa, enter argon gas, adjust the pressure in the vacuum chamber to 1Pa, turn on the power, DC sputter Ti or Ni target, the thickness is about 100nm, the sputtering power is 100W, the working pressure is 1Pa, the sputtering time is about 15min, then turn off the power. Introduce a certain amount of mixed gas of argon and methane, adjust the gas flowmeter so that the air pressure in the sputtering chamber is 0.5Pa, and the content of methane is 15%, turn on the power, and use radio frequency sputtering MoS 2 Target, power 100W, DC sputtering Ti target, power 30W, working pressure 0.5Pa, sputtering time 100 minutes, turn off the power, after the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to make a film with a thickness of about 1.0μm fi...

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Abstract

The invention relates to a self-lubricating antifriction composite thin film based on MoS2-TiC-C and a preparation method thereof, belonging to the technical field of nano-surface treatment, and the MoS2-TiC-C composite thin film is prepared by sputtering pure titanium or pure nickel on a stainless steel substrate and further carrying out reactive magnetron sputtering. The preparation process is simple, the deposition process is easy to control, and the composite thin film after deposition does not need to carry out heat treatment and can be directly used as the antifriction protective thin film on the surface of a mechanical part. The composite thin film prepared by the process has high hardness, the nano-hardness can achieve 7.6GPa, the anti-wear and antifriction performance is excellent, the friction coefficient can achieve 0.04, and the surface of the thin film can avoid the phenomena of wearing through and shedding after the friction and wear test.

Description

technical field [0001] The present invention relates to a material and method in the field of nano-processing technology, specifically a MoS-based 2 - TiC-C self-lubricating anti-friction composite film and its preparation method. Background technique [0002] In recent years, the research on solid lubricating materials has become a hot topic in the field of tribology. Compared with liquid lubricants, on the one hand, it has a higher service temperature and greater load-carrying capacity, and on the other hand, it can reduce environmental pollution. The commonly used solid lubricating materials are mainly MoS 2 、WS 2 and graphite, in which MoS 2 The research and application of base lubricating materials are the most extensive. Ordinary layered structure (2H) transition metal sulfide MoS 2 The crystal is a hexagonal structure formed by S-Mo-S atoms. In each layer, the S-Mo atoms are bonded by strong covalent bonds, and the layers are bonded by weak van der Waals bonds. ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34
Inventor 宋佳李倩倩尹桂林余震何丹农
Owner SHANGHAI JIAO TONG UNIV
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