Preparation method of rare earth doped Bi2Te3 based thermoelectric film material

A thermoelectric thin film and rare earth doping technology, which is applied in the manufacture/processing of thermoelectric devices, thermoelectric device node lead-out materials, metal material coating technology, etc., can solve the difficulties of thin film materials, high production costs, complex influencing factors, etc. problem, achieve the effect of increasing carrier concentration, improving thermoelectric performance, and simple production method

Inactive Publication Date: 2011-01-26
JIUJIANG UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The equipment of molecular beam epitaxy technology is expensive and the production cost is high
Although electrochemical atomic layer epitaxy does not require vacuum when depositing thermoelectric thin films, and the cost is low, the influencing factors are quite complicated. The performance of the thin film is not only determined by the deposition current, voltage, temperature, solvent, pH value and concentration of the solution, but also by the solution. Influenced by factors such as ionic strength and electrode surface state, it is very difficult to prepare ideal thin film materials with complex components by electrochemical atomic layer epitaxy; metal organic chemical vapor deposition methods have expensive raw materials and produce toxic gases during use Sources and expensive equipment, etc.
More importantly, none of the above deposition methods can achieve rare earth-doped Bi 2 Te 3 Preparation of base thermoelectric thin film materials

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] After weighing the raw materials (Bi, Te and La) according to the atomic ratio Bi1.998Te3La0.002, put them into a quartz tube, vacuum seal and place them in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, the deposited film is annealed, the annealing temperature is 473K, the annealing time is 1h, and the rare earth doped Bi1.998Te3La0.002 thermoelectric thin film material is obtained.

Embodiment 2

[0015] After the raw materials (Bi, Te and La) are calculated and weighed according to the atomic ratio Bi1.996Te3La0.004, they are put into a quartz tube, vacuum-sealed and placed in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, and the deposited film is annealed at a temperature of 473K and annealing time of 1h to obtain a rare earth-doped Bi1.996Te3La0.004 thermoelectric film material.

Embodiment 3

[0017] After the raw materials (Bi, Te and La) are calculated and weighed according to the atomic ratio Bi1.994Te3La0.006, they are put into a quartz tube, vacuum-sealed and placed in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, and the deposited film is annealed at an annealing temperature of 473K and annealing time of 1h to obtain a rare earth-doped Bi1.994Te3La0.006 thermoelectric thin film material.

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Abstract

The invention relates to a rare earth doped Bi2Te3 based thermoelectric film material which is prepared by the steps of: adding rare earth elements during vacuum melting to obtain a Bi2-xTe3REx block thermoelectric material, wherein RE represents the rare earth elements, x is equal to 0.002-0.01, and the doped rare earth elements are light rare earth elements of La and Ce; and grinding the molten material into powder particles of 200-300 mu m to be used as a raw material of a flash evaporation method. The film is prepared by adopting the flash evaporation method, and the deposited film is annealed to obtain the rare earth doped Bi2-xTe3REx thermoelectric film material. The thermoelectric property of the rare earth doped Bi2-xTe3REx thermoelectric film material is superior to an undoped Bi2Te3 based thermoelectric film material, a doping principle is that the rare earth elements have properties similar to alkaline earth, and when the rare earth elements are added, a Bi position is easily replaced to be used as donor doping, which improves carrier concentration, thus the thermoelectric property of the Bi2Te3 based film material is improved.

Description

technical field [0001] The invention relates to a thermoelectric thin film material, in particular to a rare earth-doped Bi 2 Te 3 based thermoelectric thin film materials. Background technique [0002] Bi 2 Te 3 The base material is one of the typical thermoelectric materials for semiconductor refrigeration. It has broad application prospects in microelectronics, optoelectronics and many high-tech fields, and has attracted widespread attention in recent years. Bi 2 Te 3 The thermoelectric properties of base thermoelectric thin film materials are still low for practical applications and need to be further improved. The development of low-dimensional and optimal doping technology has opened up new avenues for the research of high-performance thermoelectric materials. Low-dimensional thermoelectric materials provide the possibility of greatly improving thermoelectric performance through quantum size effects in electron and phonon transport. Doping can adjust the carrier...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/14C23C14/24H01L35/34H01L35/16
Inventor 段兴凯江跃珍
Owner JIUJIANG UNIVERSITY
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