Cleaning agent for silicon materials and method for cleaning silicon materials
A cleaning agent and silicon material technology, applied in cleaning methods and utensils, cleaning methods using liquids, detergent compositions, etc., can solve the problems of poor process stability, strong corrosion, high cleaning costs, and achieve good biodegradation performance. Effect
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[0039] Example 1
[0040] Step 1. Prepare three cleaning agents, SEH-1, SEH-2, and SEH-3 according to the following proportions. The cleaning agent SEH-1 is composed of the following components by mass: fatty alcohol polyoxyethylene ether is 5; Alkylphenol polyoxyethylene ether is 3; Alkyl alcohol amide is 8; Glycol alkyl ether is 7; Chelating agent ethylenediaminetetraacetic acid is 3; Chloric acid is 6; H 2 O 2 It is 2; deionized water is the balance, and the total number is 100.
[0041] The cleaning agent SEH-2 consists of the following components in parts by mass: coconut oil alkyl amide phosphate is 15; triethanolamine oleic acid soap is 15; triethanolamine is 1; aminotriacetic acid is 0.1; potassium hydroxide is 2; Ionized water is the balance, and the total number of parts is 100.
[0042] The cleaning agent SEH-3 is composed of the following components in parts by mass: acetic acid is 10; citric acid is 10; sorbitol is 0.1; deionized water is the balance, and the total numb...
Example Embodiment
[0048] Example 2
[0049] Step 1. Prepare three cleaning agents of SEH-1, SEH-2 and SEH-3 according to the following proportions. The cleaning agent SEH-1 is composed of the following components in parts by mass: fatty alcohol polyoxyethylene ether is 25; alkylphenol polyoxyethylene ether is 15; alkyl alcohol amide is 2; glycol alkyl ether is 0.5; chelating agent citric acid is 5; chloric acid is 10; H 2 O 2 Is 0.5; deionized water is the balance, and the total number is 100.
[0050] The cleaning agent SEH-2 is composed of the following components in parts by mass: coconut oil alkyl amide phosphate is 4; triethanolamine oleic acid soap is 3; triethanolamine is 5; aminotriacetic acid is 5; potassium hydroxide is 5; Ionized water is the balance, and the total number of parts is 100.
[0051] The cleaning agent SEH-3 is composed of the following components in parts by mass: acetic acid is 5; citric acid is 0.5; sorbitol is 5; deionized water is the balance, and the total number of par...
Example Embodiment
[0057] Example 3
[0058] Step 1. Prepare three cleaning agents, SEH-1, SEH-2, and SEH-3 according to the following proportions. The cleaning agent SEH-1 is composed of the following components by mass: fatty alcohol polyoxyethylene ether is 8; Alkylphenol polyoxyethylene ether is 5; Alkyl alcohol amide is 4; Glycol alkyl ether is 2; Chelating agent hydroxyethylene diphosphonic acid is 0.1; Chloric acid is 5; H 2 O 2 It is 5; deionized water is the balance, and the total number is 100.
[0059] The cleaning agent SEH-2 is composed of the following components in parts by mass: coconut oil alkyl amide phosphate is 6; triethanolamine oleic acid soap is 5; triethanolamine is 2; aminotriacetic acid is 1; potassium hydroxide is 1; Ionized water is the balance, and the total number of parts is 100.
[0060] The cleaning agent SEH-3 is composed of the following components in parts by mass: acetic acid is 5; citric acid is 0.5; sorbitol is 0.1; deionized water is the balance, and the total n...
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