Solar battery cell and process for producing the same

Abstract

A second conductivity type impurity diffusion layer and an antireflection film are formed on one side of a first conductivity type semiconductor substrate. A glass-containing first electrode material is coated on the antireflection film. A passivation film is formed on the other side of the semiconductor substrate. A plurality of opening parts, which reaches the other side of the semiconductor substrate, is formed in at least a part of the passivation film. A second electrode material containing the first conductivity type impurity element is coated so as to embed the plurality of opening parts and so as not to come into contact with the second electrode material in the adjacent opening part. A third electrode material is coated onto the passivation film so as to come into contact with the coated whole second electrode material. After coating the first electrode material and the third electrode material, the semiconductor substrate is heated at a predetermined temperature. The above constitution can realize simultaneous formation of a first electrode, which passes through the antireflection film and is electrically connected to the impurity diffusion layer, a high-concentration region, in which, on the other side of the semiconductor substrate, the first conductivity type impurity is diffused in a higher concentration than the other region of the semiconductor substrate, and the second and third electrodes electrically connected to the high-concentration region.

Description

technical field [0001] The present invention relates to a solar battery cell and a method for manufacturing the same, and particularly to a solar battery cell capable of reducing warping of the solar cell and having good characteristics even when the substrate is thinned, and such a solar cell that can be efficiently manufactured A method of manufacturing a unit solar cell unit. Background technique [0002] Conventionally, aluminum pastes used as rear aluminum electrodes of photovoltaic devices such as solar cells have an advantage that the electrodes can be easily formed by methods such as screen printing. In addition, the aluminum paste has an advantage that a so-called BSF (Back Surface Field: Back Surface Field) layer can be easily formed, that is, a layer in which aluminum is diffused into a silicon substrate and a p-type impurity is diffused at a high concentration can be easily formed by heat treatment. p+ layer, and generate a barrier electric field for the minorit...

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Problems solved by technology

In this way, when a silicon oxide film is used in the back passivation film, it is necessary to form a resist pattern in the back passivation film by photolithography, and to open the silicon oxide film with hydrofluoric acid. , the number of processes has also increased significantly, making it impossible to efficiently mass-produce solar cells

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