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Preparation method of silicon-aluminium alloy hollow rotary target for vacuum sputtering coating

A silicon-aluminum alloy and vacuum sputtering technology, which is applied in sputtering coating, vacuum evaporation coating, metal material coating process, etc., can solve the problems of not being able to be used as a target material, silicon phase segregation, material oxidation, etc., and achieve reduction The effect of quality risk, good compactness and high yield

Inactive Publication Date: 2012-02-15
METALINK SPECIAL ALLOYS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult to prepare silicon-aluminum alloys with high silicon content by melting and casting. When silicon-aluminum alloys with high silicon content are prepared by melting and casting, the melting temperature is very high. 1. The melting point of the aluminum element is very different, the segregation of the silicon phase is very serious during cooling and crystallization, and the defects such as shrinkage cavity, porosity, and pores of the alloy casting are also very serious, so it cannot be used as a target at all.
In addition, due to the brittleness of silicon-aluminum alloys, cracks caused by casting stress are prone to occur
At present, the melting and casting method is not used to prepare the silicon-aluminum alloy hollow rotating target with high silicon content

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Embodiment one: adopt the silicon powder that average particle size is 50 μ m, the aluminum powder that average particle size is 20 μ m, the purity of silicon powder is 99.9%, the purity of aluminum powder is 99.95%, oxygen content is lower than 200PPm, two kinds of powders are silicon powder in proportion : After the weight ratio of aluminum=75:25 was weighed, the mixture was mixed in a ball mill for 10 hours. Evenly and densely packed into the wrapping container, the lining material of the wrapping container is nickel-chromium alloy, and the outer casing is ordinary carbon steel sheet. After welding and assembly, before loading, carefully inspect with ultrasonic flaw detection and penetrant flaw detection. The inner diameter of the container is 125mm, and the outer diameter is 160mm. Then pump air under the two-stage pump system of mechanical pump and oil diffusion pump, heat and degas at 250°C, and pump air to a vacuum degree of 4*10 -4 Pa, seal and weld the sheath,...

Embodiment 2

[0035] Embodiment two: adopt the silicon powder that average particle size is 20 μ m, the aluminum powder that average particle size is 30 μ m, the purity of silicon powder is 99.9%, the purity of aluminum powder is 99.95%, oxygen content is lower than 200PPm, two kinds of powders are siliconized in proportion : After the weight ratio of aluminum=90:10 has been weighed, it is mixed in a ball mill for 16 hours. Evenly and densely packed into the wrapping container, the lining material of the wrapping container is 304 stainless steel, and the outer casing is ordinary carbon steel sheet. After welding and assembly, before loading, carefully inspect with ultrasonic flaw detection and penetrant flaw detection. The inner diameter of the container is 65mm, and the outer diameter is 100mm. Then pump air under the two-stage pump system of mechanical pump and oil diffusion pump. -4 At Pa, seal and weld the sheath, and then send it to the working room of the hot isostatic press. The me...

Embodiment 3

[0036]Embodiment three: adopt the silicon powder that average particle size is 150 μ m, the aluminum powder that average particle size is 100 μ m, the purity of silicon powder is 99.9%, the purity of aluminum powder is 99.96%, oxygen content is lower than 200PPm, two kinds of powders are siliconized in proportion : After the weight ratio of aluminum=50:50 has been weighed, adopt common mechanical mixing mode to mix for 16 hours. Evenly and densely packed into the wrapping container, the lining material of the wrapping container is nickel-chromium alloy, and the outer casing is ordinary carbon steel sheet. After welding and assembly, before loading, carefully inspect with ultrasonic flaw detection and penetrant flaw detection. The inner diameter of the container is 125mm, and the outer diameter is 160mm. Then pump air under the two-stage pump system of mechanical pump and oil diffusion pump. -4 Pa, seal and weld the sheath, and then send it to the working room of the hot isost...

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Abstract

The invention discloses a preparation method of a silicon-aluminium alloy hollow rotary target for vacuum sputtering coating. The method comprises the following flows: mixing silicon powder and aluminum powder as raw materials, charging, performing high-vacuum heating for degassing and sealing welding, performing hot isostatic pressing and machining and obtaining the finished product. The method is a technology capable of obtaining the high-quality silicon-aluminium alloy hollow rotary target; and the method has the advantages that technological parameters can be controlled easily, technological process is short, product yield is high and raw material utilization rate is high. The prepared silicon-aluminium alloy target has wide application prospect in functional plating and decoration coating.

Description

technical field [0001] The invention relates to a method for preparing a target, in particular to a method for preparing a silicon-aluminum alloy hollow rotating target for vacuum sputtering coating. Background technique [0002] Vacuum coating technology is not only a widely used engineering technology, but also an interdisciplinary subject. In recent years, more and more attention has been paid to the surface treatment and surface coating industry, and it has become an important surface processing technology. At present, silicon-aluminum alloy targets for vacuum sputtering coatings have been widely used in the electronics industry and glass coating industry. Through the optimized design and implementation of surface and thin film technology and engineering, the surface of the material is endowed with new mechanical functions, decorative functions and special functions (including sound, light, electricity, magnetism and their conversion and various special physical and che...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/14B22F3/14
Inventor 缑彦春王彬
Owner METALINK SPECIAL ALLOYS CORP
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