Composite back reflection metal electrode for thin film solar cell, as well as preparation method and application of composite back reflective metal electrode
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A technology of thin-film solar cells and metal electrodes, which is applied in the manufacture of circuits, electrical components, and final products. The effect of peeling off and improving adhesion
Inactive Publication Date: 2012-07-11
SHANGHAI INST OF SPACE POWER SOURCES
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[0004] In order to solve the problems such as small adhesion between the existing back reflector and the substrate, easy to fall off, etc., the technical problem to be solved by the present invention is to provide a kind of composite back reflective metal electrode, and provide the manufacture of the composite back reflective metal electrode Method and its application
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Embodiment 1
[0030] figure 1 A schematic diagram of the structure of a single-junction silicon-based thin-film solar cell comprising a composite back-reflecting metal electrode of the present invention is provided. According to the present invention, the main steps of preparing the main body of the solar cell are as follows:
[0031] The first step: put the prepared substrate containing the metal transition layer (nickel or cadmium or copper or titanium), the textured silver film, and the aluminum-doped zinc oxide barrier layer into the plasma-enhanced chemical vapor deposition system, the substrate Bake at 200°C for 1 hour;
[0032] The second step: sequentially deposit n, i, p three layers of silicon-based films in different chambers;
[0033] Step 3: Cool down to room temperature, take out the sample; place the sample prepared with silicon-based thin film in the coating system, and prepare aluminum-doped zinc oxide, tin dioxide or indium tin oxide transparent conductive film;
[0034]...
Embodiment 2
[0038] image 3A schematic structural view of a multi-junction silicon-based thin-film solar cell comprising a composite back-reflecting metal electrode of the present invention is provided. According to the present invention, the main steps of preparing the solar cell body are as follows:
[0039] The first step: put the prepared substrate containing the metal transition layer (nickel or cadmium or copper or titanium), the textured silver film, and the aluminum-doped zinc oxide barrier layer into the plasma-enhanced chemical vapor deposition system, the substrate Bake at 200°C for 1 hour;
[0040] The second step: sequentially deposit n, i, p three layers of silicon-based films 14-16 in different chambers;
[0041] Step 3: sequentially deposit n, i, p three layers of silicon-based films 17-19 in different chambers;
[0042] Step 4: Cool down to room temperature, take out the sample; place the sample prepared with silicon-based thin film in the coating system, and prepare al...
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Abstract
The invention discloses a composite back reflection metal electrode for a thin film solar cell; the composite back reflective metal electrode is a composite multi-layer film, and a transition layer metal, a silver film and aluminum-doped zinc oxide are sequentially deposited on a substrate. The invention further discloses a preparation method of the composite back reflective metal electrode. According to the composite back reflective metal electrode disclosed by the invention, as the transition layer metal has excellent adhesion with the flexible substrate, all layers of the deposited thin films are less prone to shed from the substrate; simultaneously, the silver film has obvious texture, and a light trapping structure is formed, so that the reflection of incident light is enhanced, the absorption of the incident light in an absorption layer of the cell is fuller, and the performances of the cell can be improved; and the aluminum-doped zinc oxide has appropriate thickness, so that the aluminum-doped zinc oxide can not only prevent silver from being diffused and entering into the cell during the preparation process of the cell, but also have the effects of covering a peak on the surface of the silver film and enhancing reflected light. Therefore, the composite back reflective metal electrode disclosed by the invention can improve the bonding force between the thin films and the substrate, and significantly improve the performances of the cell and the uniformity.
Description
technical field [0001] The invention relates to a photovoltaic cell and a preparation method thereof, more specifically, to a composite back-reflective metal electrode for a thin-film solar cell, a preparation method and application thereof. Background technique [0002] Since the world's first amorphous silicon solar cell was manufactured by the RCA laboratory in the United States in 1976, silicon-based thin-film solar cells have attracted widespread attention due to their unique advantages, and have developed rapidly and have broad application prospects. [0003] The typical structure of silicon-based thin-film solar cells is substrate / back electrode / nip-Si / top electrode / gate line stacked in sequence. In recent years, many studies on fabrication methods, materials, and device structures have been carried out around improving battery performance. The efficiency of silicon-based thin-film cells strongly depends on the quality of the metallized back reflector of the substrat...
Claims
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