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Fabrication of ordered arrays of tio2 nanotubes on al2o3 ceramic substrate

A technology of ordered arrays and ceramic substrates, applied in the field of preparation of one-dimensional nanomaterials, can solve the problems of difficult to obtain nanotube films and difficult separation of nanotube arrays, and achieve the effects of uniform film formation, low price and easy operation

Inactive Publication Date: 2016-01-13
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This patent makes highly ordered Ti0 on the existing titanium sheet or titanium foil 2 Nanotube array, but the defect of this patent is that the prepared nanotube array is difficult to separate from titanium sheet or titanium foil, so it is difficult to obtain a very thin layer of TiO 2 nanotube film

Method used

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  • Fabrication of ordered arrays of tio2 nanotubes on al2o3 ceramic substrate
  • Fabrication of ordered arrays of tio2 nanotubes on al2o3 ceramic substrate
  • Fabrication of ordered arrays of tio2 nanotubes on al2o3 ceramic substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] (1) Put 5×5cm Al 2 o 3 The ceramic sheet was ultrasonically cleaned in acetone, alcohol and deionized water for 10 min in sequence;

[0032] (2) Place the ceramic sheet in (1) in the magnetron sputtering chamber, use DC sputtering titanium target, sputter a layer of pure Ti, sputtering power 200W, sputtering time 1h, pure argon gas flow rate 40sccm, Back vacuum degree 4.0×10 -4 Pa, the sputtering pressure is 0.6pa, and the final titanium film thickness is about 1.5μm;

[0033] (3) To configure anodic oxidation, measure 360mL of glycerin, 40mL of deionized water, and weigh NH 4 F4.7972g.

[0034] (4) Anodize the titanium film obtained in (2) with a voltage of 30V and a time of 1.5h.

[0035] Such as figure 1 Shown is the SEM image of the Ti film after magnetron sputtering (150W, 2h), such as figure 2 As shown, TiO after anodic oxidation 2 SEM image of nanotubes (30V, 1.5h), where: figure 1 It can be clearly seen that the granular Ti, figure 2 It can be observ...

Embodiment 2

[0037] (1) Al 2 o 3 The ceramic sheet was ultrasonically cleaned in acetone, alcohol and deionized water for 10 min in sequence;

[0038] (2) Place the ceramic sheet in (1) in the magnetron sputtering chamber, use DC sputtering titanium target, sputter a layer of pure Ti, sputtering power 150W, sputtering time 2h, pure argon gas flow rate 40sccm, Back vacuum degree 4.0×10 -4Pa, the sputtering pressure is 0.3pa, and the final titanium film thickness is about 1.3μm; the substrate temperature is 200°C;

[0039] (3) Configure the electrolyte for anodic oxidation, measure 360mL of glycerin, 36mL of deionized water, and weigh 4.8034g of NH4F.

[0040] (4) Anodize the titanium film obtained in (2) with a voltage of 30V and a time of 2h.

[0041] Such as image 3 Shown, is the TiO after anodic oxidation 2 SEM images of nanotubes (30V, 2h), where, image 3 TiO can be observed 2 The diameter of the nanotube is 80-100nm, and the thickness of the tube wall is 10-20nm. However, the...

Embodiment 3

[0043] (1) Al 2 o 3 The ceramic sheet was ultrasonically cleaned in acetone, alcohol and deionized water for 10 min in sequence;

[0044] (2) Place the ceramic sheet in (1) in the magnetron sputtering chamber, use DC sputtering titanium target, sputter a layer of pure Ti, sputtering power 180W, sputtering time 2h, pure argon gas flow rate 80sccm, Back vacuum degree 4.0×10 -4 Pa, the sputtering pressure is 0.6pa, and the final titanium film thickness is about 1.3μm; the substrate temperature is 400°C;

[0045] (3) Configure the electrolyte for anodic oxidation, measure 360mL of glycerin, 40mL of deionized water, and weigh 4.8044g of NH4F.

[0046] (4) Anodize the titanium film obtained in (2) with a voltage of 30V and a time of 1h.

[0047] Such as Figure 4 Shown, is the TiO after anodic oxidation 2 SEM images of nanotubes (30V, 1h), where, Figure 4 TiO can be observed 2 The diameter of the nanotube is 70-80nm, and the thickness of the tube wall is 10-20nm.

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Abstract

The invention discloses a method for preparation of a TiO2 nanotube ordered array on an Al2O3 ceramic substrate. The method comprises the following steps: (1) sputtering a layer of a pure titanium membrane on an Al2O3 ceramic chip by using a magnetron sputtering method; (2) preparing an anodization solution; and (3) subjecting the Al2O3 ceramic chip sputtered with the titanium membrane to anodization so as to obtain a highly-ordered TiO2 nanotube array. The method overcomes the defect that a titanium sheet or titanium foil must be used for preparation of a highly-ordered nanotube, uses the magnetron sputtering method to prepare the thin titanium membrane and carries out anodization to obtain the highly-ordered TiO2 nanotube array. According to the invention, operation is simple and convenient, reaction conditions are mild, the magnetron sputtering method has the advantages of a cheap price and uniform film forming, and the method provided by the invention is applicable to large-area preparation of a film and is suitable for industrial production.

Description

technical field [0001] The present invention relates to the preparation of a kind of one-dimensional nanometer material, specifically, what relate to is a kind of Al 2 o 3 TiO on ceramic substrate 2 Preparation method of ordered array of nanotubes. Background technique [0002] Due to their unique properties such as small size effect, surface effect, quantum size effect, macroscopic quantum tunneling effect, and dielectric confinement effect, nanomaterials exhibit various superior properties that conventional materials do not possess. [0003] TiO 2 It has a wide band gap (3.0ev), high refractive index and stable chemical properties, and has excellent properties such as acid and alkali resistance, redox resistance, light corrosion resistance, non-toxic and low cost. [0004] It has broad application prospects in the storage and utilization of solar energy, photoelectric conversion, hydrogen production by photolysis of water, especially in biomedicine. TiO 2 Nanotubes h...

Claims

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Application Information

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IPC IPC(8): C25D11/26C23C14/35C23C14/18B82Y40/00
Inventor 张小秋张柯李文英尹桂林姜来新余震何丹农
Owner SHANGHAI JIAO TONG UNIV
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