Zr/MaN composited coating on surface of high-speed steel cutting tool and preparation method thereof
A cutting tool and composite coating technology, which is applied in coatings, chemical instruments and methods, metal material coating technology, etc., can solve the problems of coarse structure, low bonding force, poor wear resistance, etc. Good peeling, consistency and uniformity of thickness
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Embodiment 1
[0037] The high-speed steel hob is sandblasted and ultrasonically cleaned by conventional methods, and then put into the coating machine, and then the coating chamber is vacuumed to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 4.5×10 -1 Pa, and control the heating power of 10KW to heat the tool to be plated for 150min; at a pressure of 2.0×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -200V, the pulse bias voltage is -800V, and the tool to be plated is cleaned with a plasma power of 6KW for 30min; at a pressure of 2.0×10 -1 Under the protection of Pa argon gas, control the DC bias voltage to -200V, and clean the tool to be plated with a plasma with a power of 6KW for 30min; at a pressure of 1.0×10 -1 Under the protection of argon gas in Pa, heat the Zr metal evaporation source with a plasma enhanced source with a power of 10KW, control the DC bias voltage -200V, and plate at a pulse bias volta...
Embodiment 2
[0040] Put the high-speed steel drill bit into the coating machine after sandblasting and ultrasonic cleaning by conventional methods, and then vacuumize the coating chamber to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 4.0×10 -1 Pa, and control the heating power 9KW to heat the tool to be plated for 90min; at a pressure of 1.7×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -200V, the pulse bias voltage is -600V, and the tool to be plated is cleaned with a plasma power of 5KW for 20min; at a pressure of 1.7×10 -1 Under the protection of Pa argon gas, control the DC bias voltage to -200V, and clean the tool to be plated with a plasma with a power of 5KW for 20min; at a pressure of 1.3×10 -1 Under the protection of argon gas in Pa, heat the Zr metal evaporation source with a plasma enhanced source with a power of 9KW, control the DC bias voltage -200V, and plate at a pulse bias voltage -400V fo...
Embodiment 3
[0043] The high-speed steel end mills are sandblasted and ultrasonically cleaned by conventional methods, and then placed in the coating machine, and then the coating chamber is vacuumed to 5.0×10 -3 Pa, argon gas is introduced to make the total pressure in the coating machine 4.0×10 -1 Pa, and control the heating power of 8.5KW to heat the tool to be plated for 70min; at a pressure of 1.5×10 -1 Under the protection of Pa argon gas, the DC bias voltage of the control tool is -100V, the pulse bias voltage is -500V, and the tool to be plated is cleaned with a power of 4KW for 15min; at a pressure of 1.5×10 -1 Under the protection of Pa argon gas, control the DC bias voltage to -100V, and clean the tool to be plated with a plasma with a power of 4KW for 15min; at a pressure of 1.0×10 -1 Under the protection of argon gas in Pa, heat the Zr metal evaporation source with a plasma enhanced source with a power of 7.5KW, control the DC bias voltage -100V, and plate at a pulse bias vol...
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