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Preparation method for electrically-conducting transparent TiO2/Ag/TiO2 composite film

A composite thin film, transparent and conductive technology, applied in the direction of solid-state chemical plating, metal material coating process, coating, etc., can solve the problems of poor wettability, discontinuous film formation, Ag oxidation, etc., and achieve good wettability and good transparency High pass rate and conductivity, low cost effect

Active Publication Date: 2013-04-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Noble metals such as Ag have poor wettability with most metal oxides
And in the preparation of the outer TiO 2 When oxygen is introduced, the substrate needs to be heated, which can easily lead to Ag oxidation. At the same time, the ion beam bombardment during the preparation process will also damage the continuity of the Ag layer, and agglomerates into island-shaped discontinuous formations. film phenomenon, which in turn affects the conductivity and transmittance of the entire film system, so it is necessary to 2 A metal Ti barrier layer is added between them, which will lead to a decrease in the conductivity and light transmission properties of the composite film, which is not conducive to the application

Method used

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  • Preparation method for electrically-conducting transparent TiO2/Ag/TiO2 composite film
  • Preparation method for electrically-conducting transparent TiO2/Ag/TiO2 composite film
  • Preparation method for electrically-conducting transparent TiO2/Ag/TiO2 composite film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Step 1) Clean the glass substrate: Sonicate the glass substrate for 15 minutes in the following order: detergent solution, absolute ethanol, ether, acetone, deionized water.

[0026] Step 2) Stir and mix tetrabutyl titanate, acetic acid, and absolute ethanol to obtain solution A; mix and stir deionized water, absolute ethanol, ammonium tungstate, and ammonium fluoride to obtain solution B, the above-mentioned ammonium tungstate, Ammonium fluoride is used as a doping component; the volume ratio of tetrabutyl titanate: absolute ethanol: water: acetic acid is 17:160:0.9:2; the concentration of ammonium tungstate in water is 0.2g / 100ml; Ammonium is 2.5% by weight of water.

[0027] Step 3) Add solution B in step 2) dropwise to solution A, stir and mix evenly to form a sol.

[0028] Step 4) Aging the sol obtained in step 3) at room temperature for more than 24 hours to obtain a sol-gel;

[0029] Step 5) Coating the sol-gel in step 4) on the substrate of step 1);

[0030] ...

Embodiment 2

[0039] Same as Example 1, the difference is that the doping components in the B solution are aluminum nitrate and ammonium fluoride, and the doping ratio remains unchanged;

[0040] The transmittance of the film was measured with a Shimadzu UV-3101PC UV-Vis spectrophotometer, and the test results are shown in figure 1 Curve c, the maximum transmittance is 89%.

[0041] The electrical properties of the thin film were measured using a HMS-3000 Hall effect instrument, and the test results are shown in Table 2.

[0042] Table II:

[0043]

[0044] It shows that the film has excellent transmittance and conductivity.

Embodiment 3

[0046] Same as Example 1, the difference is that the doping components in solution B are ammonium metavanadate and ammonium fluoride, and the doping ratio remains unchanged.

[0047] The transmittance of the film was measured with a Shimadzu UV-3101PC UV-Vis spectrophotometer, and the test results are shown in figure 1 Curve d, the maximum transmittance is 89%.

[0048] The electrical properties of the thin film were measured using a HMS-3000 Hall effect instrument, and the test results are shown in Table 3.

[0049] Table three:

[0050]

[0051] It shows that the film has excellent transmittance and conductivity.

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Abstract

The invention relates to a preparation method for an electrically-conducting transparent TiO2 / Ag / TiO2 composite film, which belongs to the fields of thin film materials and film optics. In a multilayer structure of the TiO2 / Ag / TiO2 composite film, a doped TiO2 layer is prepared by using a sol-gel coating method, and no interfacial optimization layer needs to be added between the doped TiO2 layer and an Ag layer; maximum transmittance at a visible region exceeds 90%, and resistivity is less than 9*10<-5> omega.cm. The preparation method provided by the invention has the advantages of a simple process and low cost, enables the TiO2 / Ag / TiO2 composite film with low resistivity and high transmittance to be prepared through doping and is applicable to large-area industrial production.

Description

technical field [0001] What the present invention relates to is a kind of transparent conductive TiO 2 / Ag / TiO 2 Preparation method of composite film. The invention belongs to the field of functional thin film materials and thin film optics. Background technique [0002] TiO 2 It is a kind of wide bandgap semiconductor, its bandgap width is generally 3.0-3.4 eV, and it is widely used in electroluminescence, solar cells, photocatalysis and other fields. Currently available TiO 2 The transparent conductive film is Nb:TiO prepared by Furubayashi et al. in 2005 2 Thin films need to be doped with the expensive transition metal element niobium. The Ag film has excellent reflective properties in the visible light region, using the principle of induced transmission, through a reasonable TiO 2 Matching can achieve a good anti-reflection effect in a certain spectral range, becoming TiO 2 / Ag / TiO 2 Transparent conductive composite film. TiO 2 / Ag / TiO 2 Transparent conductiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C20/08
Inventor 范翊刘星元郭晓阳
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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