Method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by excimer laser

A technology of excimer laser and excimer laser, which is applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problem of ineffective use of deposition technology, physical and chemical damage of flexible materials, substrate Reduced transmittance and other issues, to achieve the effect of eliminating lattice defects, improving photoelectric performance, and improving photoelectric performance

Inactive Publication Date: 2013-05-01
ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, these methods will cause severe physical and chemical damage to the surface of flexible materials, and the transmittance of the substrate will be significantly reduced.
In addition, the AZO transparent conductive film grown on the flexible substrate with the existing deposition technology must be carried out at low temperature, the film is not eas

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  • Method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by excimer laser
  • Method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by excimer laser
  • Method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by excimer laser

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Embodiment Construction

[0024] Select the flexible PET substrate 8 and clean it; grow a layer of aluminum-doped zinc oxide film 7 on the PET substrate 8 by using film deposition technology; place the PET substrate 8 with the aluminum-doped zinc oxide film 7 on the base 9 , the film was irradiated by excimer laser annealing.

[0025] Such as figure 1 As shown, the excimer laser annealing device includes: an excimer laser 1 for providing laser light; a power controller 2 for adjusting voltage, pulse frequency and laser energy; a mirror 3; A device 4; a square diaphragm 5 that turns the shaped laser into a specified size; a convex lens 6 for adjusting the spot size; a flexible PET substrate 8 with an aluminum-doped zinc oxide film 7 grown on it; a base 9 for carrying the substrate.

[0026] In the embodiment device of the present invention, a KrF excimer laser 1 is used, and the laser beam emitted by the KrF excimer laser 1 is a rectangular spot with a spot size of 8mm×20mm. Because the laser spot wil...

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Abstract

The invention discloses a method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by an excimer laser. The method utilizes an excimer laser device to perform laser annealing for an aluminum doped zinc oxide (for short AZO) film, and thereby improving the photoelectric property of the AZO film. The method comprises the steps as follows: firstly, methods such as pulsed laser deposition and the like are utilized to generate a layer of AZO film on a flexible substrate, and then an excimer laser annealing device is used to anneal the film. The method for improving the flexible AZO film photoelectric property by the excimer laser is characterized in that high power pulse laser beams are irradiated on the AZO film, the inner film surface reaches very high temperature in an extremely short time, and the flexible substrate material is not damaged, accordingly, the crystalline degree of the film is improved, and the electrical resistivity of the film is substantially reduced, so that the photoelectric property of the film is improved.

Description

technical field [0001] The invention relates to the field of processing methods for photoelectric information functional materials, in particular to a method for improving the photoelectric performance of a flexible AZO thin film by using an excimer laser. Background technique [0002] Transparent conductive oxide film is an excellent photoelectric functional film. It has high transmittance in the visible light range, high reflectivity in the infrared region, and low resistivity close to metal. This series of advantages makes it widely used in electronic information The industry has been widely used, such as solar cells, flat panel displays, infrared heat mirrors, etc. There are many types of transparent conductive oxide films, mainly including oxides of In, Sn, Zn and Cd and their composite multi-element oxide film materials. At present, indium tin oxide (ITO) films are the most widely studied, but ITO film materials are scarce and expensive. , to the wide application of ...

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Application Information

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IPC IPC(8): C23C14/58C23C14/08
Inventor 邵景珍方晓东董伟伟邓赞红
Owner ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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