Process for making PCB (Printed Circuit Board) micro-fine tool by nitrogen chromic oxide and diamond-like carbon film composite coating
A technology of diamond-like film and chromium oxynitride, which is applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of low friction coefficient and achieve the effect of low friction coefficient, good lubricating performance and high hardness
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[0029] Such as figure 1 , figure 2 As shown, a diamond-like carbon film coating equipment with high adhesion, high hardness and low friction coefficient includes a coating chamber 2, a planetary rotating workpiece holder 6, a magnetic filter arc source 1, a molecular pump 5, and a frame 4.
[0030] The coating chamber 2 is fixedly installed on the frame 4. The coating chamber 2 adopts a vertical cylindrical structure Ф900×900mm, made of stainless steel, an overall double-layer water-cooled structure, and a front-opening door structure, which is convenient for changing samples, targets 15 and daily maintenance. . After the overall welding of the vacuum chamber, heat treatment is carried out to eliminate welding stress and prevent post-welding deformation. The front part of the coating chamber 2 is provided with a feed door 7 and an observation window, and the top of the coating chamber 2 is provided with a tubular heater 9, a thermocouple interface 8, an inflation valve and ...
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