Preparation process of polymer modification silicon sol

A preparation process and polymer technology, applied in the direction of silicon compounds, polishing compositions containing abrasives, inorganic chemistry, etc., can solve the problems of increased viscosity, gelation, low reuse rate of modified silica sol, etc., and achieve saving Good production process and good stability

Active Publication Date: 2014-11-19
JIANGSU HAIXUN IND GROUP SHARE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the stability of the modified silica sol obtained by the above-mentioned modification methods is not very satisfactory, and the viscosity will increase significantly under long-term storage, and even gelation. If the storage environment temperature is higher, this trend will be more obvious.
In addition, the modified silica sol obtained by this method has a low recycling rate

Method used

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  • Preparation process of polymer modification silicon sol

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Take 2,400kg of silica sol and put it into a 3,000kg reactor, add 240kg of deionized water to it, heat up to 80°C, keep the constant temperature at 80°C until the reaction is complete, and form a uniform and stable system, and then continue to keep the system temperature in the reaction vessel at 80°C ℃, slowly add 72kg of polymer modifier to the reaction vessel under stirring, the above polymer modifier needs to be added within 30min, then continue to stir the reaction system at constant temperature, and use 0.5% sodium hydroxide every 30min The pH value of the reaction system is adjusted by the solution in the range of 10-11, and the reaction is stopped after 5 hours to obtain the finished modified silica sol.

[0021] The polymer modifier in this embodiment consists of the following components:

[0022] KH570 30kg

[0023] DL602 24kg

[0024] L171 18kg

Embodiment 2

[0026] Take 2,400kg of silica sol and put it into a 3,000kg reactor, add 240kg of deionized water to it, heat up to 80°C, keep the constant temperature at 80°C until the reaction is complete, and form a uniform and stable system, and then continue to keep the system temperature in the reaction vessel at 80°C ℃, slowly add 72kg of polymer modifier to the reaction vessel under stirring, the above polymer modifier needs to be added within 30min, then continue to stir the reaction system at constant temperature, and use 0.5% sodium hydroxide every 30min The pH value of the reaction system is adjusted by the solution in the range of 10-11, and the reaction is stopped after 5 hours to obtain the finished modified silica sol.

[0027] The polymer modifier in this embodiment consists of the following components:

[0028] KH792 28kg

[0029] DL602 9kg

[0030] L171 35kg

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Abstract

The invention discloses a preparation process of polymer modification silicon sol. The preparation process is characterized by comprising the following steps: (1) placing 2,400 mass parts of silicon sol into a reaction container, adding 240 mass parts of deionized water into the reaction container, heating until the temperature rises up to 80 DEG C, and keeping the temperature of 80 DEG C constant until the reaction is completed to form a uniform stable system; (2) keeping the temperature of the system in the reaction container to be 80 DEG C, slowly adding 72 mass parts of polymer modifier which needs to be completely added within 30 min into the reaction container under a stirring state, continuously stirring the reaction system for 5 h at a constant temperature until the reaction is completed to obtain the polymer modification silicon sol, and modifying the pH value of the reaction system to be in a range of 10-11 by using a pH modifier at time intervals of 30 min within 5 h. The process is simple and efficient, and the prepared silicon sol is high in polishing speed, good in hardness, excellent in thermal stability under a long-time storage state, and high in repeated utilization rate.

Description

technical field [0001] The invention relates to the technical field of preparation of polishing materials, in particular to a preparation process of polymer modified silica sol. Background technique [0002] Silica sol, also known as silicic acid hydrosol or silica hydrosol, has been widely used in precision casting, catalyst carrier, coating, papermaking and textile industries. Due to its good water resistance, high temperature resistance, air permeability, dispersibility, skid resistance and non-polluting properties, silica sol has a special and important position in various fields. The current industrially mature preparation methods are ion exchange method and elemental silicon dissolution method. In the CMP process of semiconductor materials, silica sol needs to have good hardness, polishing rate and stability. As the disclosed modified silica sol of CN 101754929 B, the silica sol is modified by adding a surfactant and a silane coupling agent containing an epoxy group ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/146C09G1/02C09K3/14
Inventor 关飞飞雷红李薇薇
Owner JIANGSU HAIXUN IND GROUP SHARE
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