Carbon-based coating having high electrical conductivity on surface of substrate and preparation method of coating

A high-conductivity, matrix technology, applied in the field of carbon-based coatings and their preparation, can solve problems such as limiting the performance of materials and devices, and achieve the effects of easy and precise control, uniform coating thickness, and reduced resistivity

Inactive Publication Date: 2015-03-04
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although metals such as aluminum and stainless steel have excellent internal conductivity, the passivation film or oxide film formed on the exposed surface is semiconductor or insulating, which greatly limits the performance and application of related materials and devices. Therefore, it is urgent to research and develop a A material technology that reduces the surface resistance of materials and improves their surface conductivity, which is particularly important for the development of new supercapacitors and sensor devices

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  • Carbon-based coating having high electrical conductivity on surface of substrate and preparation method of coating
  • Carbon-based coating having high electrical conductivity on surface of substrate and preparation method of coating
  • Carbon-based coating having high electrical conductivity on surface of substrate and preparation method of coating

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Embodiment 1

[0032] In this embodiment, the substrate material is silicon and stainless steel, and the conductive coating on the surface of the substrate consists of a copper transition layer on the surface of the substrate and a graphite-like amorphous carbon layer on the surface of the copper transition layer.

[0033] The preparation method of this conductive coating comprises the steps:

[0034] (1) Place the silicon substrate and the stainless steel substrate on the workpiece bracket of the magnetron sputtering coating chamber respectively, and vacuumize the chamber until the air pressure drops to 5×10 -3 Below Pa, argon gas is introduced to keep the cavity pressure at 1.2Pa, and a negative bias voltage of 500V is applied to the substrate at the same time, and the substrate is cleaned by glow plasma for 20 minutes;

[0035] (2) Introduce argon gas into the chamber so that the chamber pressure is 0.4Pa, the negative bias voltage of the substrate is 100V, and the metal copper is used as...

Embodiment 2

[0072] In this embodiment, the substrate material is silicon and stainless steel, and the conductive coating on the surface of the substrate consists of a copper transition layer on the surface of the substrate and a graphite-like amorphous carbon layer on the surface of the copper transition layer.

[0073] The preparation method of this conductive coating comprises the steps:

[0074] (1) Place the substrate on the workpiece bracket of the magnetron sputtering coating chamber, and vacuum the chamber until the air pressure drops to 5×10 -3 Below Pa, argon gas is introduced to keep the cavity pressure at 1.2Pa, and a negative bias of -500V is applied to the substrate at the same time, and the substrate is cleaned by glow plasma for 20 minutes;

[0075] (2) Introduce argon gas into the cavity, make the cavity pressure at 0.4Pa, keep the negative bias voltage of the substrate at 200V, use metal copper as the target material, turn on the DC magnetron sputtering source, and adjust...

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Abstract

The invention provides a carbon-based coating having high electrical conductivity on the surface of a substrate. The coating is composed of a copper transition layer and a graphite-like amorphous carbon surface layer; the deposition method of the coating is a DC magnetron sputtering method. Compared with the prior art, the carbon-based coating having high electrical conductivity on the surface of the substrate is capable of ensuring that the structure of the amorphous carbon coating is mainly in the sp2 bond state to reduce the specific resistance, and meanwhile, the copper transition layer is advantageous for inducing the chain scission of the aromatic cyclic sp2 structure in the graphite-like amorphous carbon surface layer and more sp2 chain structures can be formed to increase free electrons, and therefore, the specific resistance of the carbon coating is further reduced and the electrical conductivity of the same is improved.

Description

technical field [0001] The invention belongs to the technical field of material surface coatings, in particular to a carbon-based coating with high conductivity and a preparation method thereof. Background technique [0002] In many electronic devices, the size of the contact resistance is the key to the structure and performance of the device. For example, in a solid aluminum electrolytic capacitor, the dense oxide film on the surface of the cathode aluminum foil causes a large contact resistance between the electrolyte and the aluminum foil electrode, resulting in a huge loss of capacitor capacity. In the proton exchange membrane fuel cell in the energy field, due to the high contact resistance between the passivation layer on the surface of the stainless steel bipolar plate and the carbon fiber diffusion layer, the output power of the fuel cell is greatly reduced. The contact resistance mentioned in the above electronic devices is affected by two factors: the contact are...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/14C23C14/06
Inventor 张栋张海峰汪爱英柯培玲陈仁德
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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