Silica glass preparation method
A technology of silica glass and ethyl orthosilicate, which is applied in the field of semiconductor preparation, can solve the problems of not being clear about the structure and morphology of doped CuCI and not many quantum confinement effects, and achieves high hardness, good optical quality and stable performance. Effect
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[0025] A method for preparing silica glass, comprising the steps of:
[0026] Use ethyl orthosilicate, boric acid, and sodium ethylate as precursors;
[0027] Using ethanol, ethylene glycol methyl ether, and ethanol as the precursor solution respectively;
[0028] Using different concentrations of hydrochloric acid as a catalyst;
[0029] Adopting hydrochloric acid solutions of different concentrations to be copper chloride as a precursor solvent;
[0030] Drying the sodium borosilicate sol doped with cupric chloride into dry sol by high-temperature thermal saturation method;
[0031] The dry sol is sintered in a muffle furnace under a high-temperature nitrogen atmosphere to obtain silica glass.
Embodiment 1
[0033] Fully mix and dissolve 1L ethyl orthosilicate, 1L boric acid, and 1L sodium ethoxide as a precursor; uniformly mix 1L ethanol, 2L ethylene glycol methyl ether, and 0.05L ethanol as a precursor solution; use volume fraction 30% hydrochloric acid as a catalyst; using different concentrations of hydrochloric acid solutions as copper chloride as a precursor solvent; drying sodium borosilicate sol doped with copper chloride at a high temperature of 800 ° C by a thermal saturation method to form a dry sol; The dry sol is sintered in a muffle furnace at a high temperature of 1000°C in a nitrogen atmosphere to obtain silica glass.
Embodiment 2
[0035] Fully mix and dissolve 1L tetraethyl orthosilicate, 2L boric acid, and 1L sodium ethoxide as a precursor; uniformly mix 1L ethanol, 2L ethylene glycol methyl ether, and 0.1L ethanol as a precursor solution; use volume fraction 35% hydrochloric acid as a catalyst; using different concentrations of hydrochloric acid solutions as copper chloride as a precursor solvent; drying sodium borosilicate sol doped with copper chloride at a high temperature of 900 ° C by a thermal saturation method to form a dry sol; The dry sol was sintered in a muffle furnace at a high temperature of 1100°C under a nitrogen atmosphere to obtain silica glass.
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