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Chromium aluminum alloy target material and preparation method thereof

A chrome-aluminum alloy and target technology, which is applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of difficulty in obtaining high-quality and uniform targets, uneven relative density of hot-pressed targets, etc. Unable to meet the target use requirements and other problems, to achieve the effects of fine grains, improved powder utilization, and high density

Active Publication Date: 2016-08-17
北京安泰六九新材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Invention patent 0113153.9 discloses a production process of chromium-aluminum alloy. The process is to use chromium powder and aluminum powder to make alloy powder, and then use cold pressing to press, the pressure is 120-200MPa, and the holding time is 2.5-3.5 seconds. The purpose is to manufacture an additive for aluminum alloy materials, which is finally melted together with aluminum, but the cold press forming process produces a purely mechanically pressed chromium and aluminum powder mixture without metallurgical bonding, which cannot meet the requirements Target use requirements
However, the size of the target is limited by the equipment, it is difficult to achieve a large target, and the relative density inside the hot-pressed target is not uniform, and there is a big difference between the center and the edge density, so it is difficult to obtain a high-quality target with uniform density

Method used

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  • Chromium aluminum alloy target material and preparation method thereof
  • Chromium aluminum alloy target material and preparation method thereof
  • Chromium aluminum alloy target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] The chromium-aluminum alloy target provided in this embodiment is composed of the following atomic percentages: 10% chromium and 90% aluminum.

[0028] Its preparation method comprises the following steps:

[0029] Step 1, according to the design requirements of the above-mentioned target material components, weigh 17.6 parts of metal chromium with an average particle size of 30 μm and a purity of 99.9%, and 82.4 parts of metal aluminum with a purity of 99.7%, and mix them in a V-shaped mixer for 3 hours. During the mixing process, vacuuming is used for protection, and the vacuum degree is controlled at 10 -2 Pa or so.

[0030] In step 2, the obtained alloy powder is put into a cold isostatic pressing mold, and cold isostatic pressing is performed under a pressure of 20 MPa, and the holding time is 10 minutes.

[0031] Step 3: Put the raw material processed by cold isostatic pressing into a stainless steel sheath of appropriate size, and place the sheath in a degassin...

Embodiment 2

[0037] The chromium-aluminum alloy target material provided in this embodiment is composed of the following atomic percentage components, 50% chromium and 50% aluminum.

[0038] Its preparation method comprises the following steps:

[0039] Step 1: Weigh 65.8 parts of chromium powder with an average particle size of 145 μm and a purity of 99.9% and 34.2 parts of aluminum powder with a purity of 99.7% according to the design requirements of the above-mentioned target material components, and mix them in a V-shaped mixer for 5 hours , filled with high-purity argon for protection during the mixing process;

[0040]Step 2, put the mixed powder into a cold isostatic pressing mold for cold isostatic pressing, the cold isostatic pressing pressure is 100MPa, and the holding time is 15min;

[0041] Step 3, put the cold isostatic pressing billet into a metal sheath of appropriate size, place the sheath in a degassing device for degassing treatment, the heating temperature is 400 ° C, t...

Embodiment 3

[0047] The chromium-aluminum alloy target provided in this embodiment is composed of the following atomic percentages, 80% chromium and 20% aluminum.

[0048] Its preparation method comprises the following steps:

[0049] Step 1: Weigh 88.5 parts of chromium powder with an average particle size of 50 μm and a purity of 99.9% and 11.5 parts of aluminum powder with a purity of 99.7% according to the design requirements of the above-mentioned target material components, and mix them in a V-shaped mixer for 3 hours , Vacuum protection during the mixing process, the vacuum degree is controlled at 10 -2 About Pa;

[0050] Step 2, put the mixed powder into a cold isostatic pressing mold for cold isostatic pressing, the cold isostatic pressing pressure is 200MPa, and the holding time is 20min;

[0051] Step 3, put the cold isostatic pressing billet into a stainless steel sheath of appropriate size, place the sheath in a degassing device for degassing treatment, the heating temperatu...

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Abstract

The invention provides a chromium-aluminum alloy target and a preparation method thereof. The preparation method comprises the steps of preparing alloy powder, carrying out cold isostatic pressing treatment, carrying out degassing treatment, carrying out hot isostatic pressing treatment and machining. The chromium-aluminum alloy target provided by the invention has the advantages of high density, no air pore and segregation, uniform tissue, small crystal grain and the like and is applicable to the coating sputtering of a variety of cutting tools and dies.

Description

technical field [0001] The invention belongs to the technical field of powder metallurgy material preparation, in particular to a method for preparing a chromium-aluminum alloy target. Background technique [0002] Since the 1960s, after nearly half a century of development, tool surface coating technology has become the main method to improve tool performance. Tool surface coating mainly increases cutting speed and feed rate by improving tool surface hardness, thermal stability, and reducing friction coefficient, thereby improving cutting efficiency and greatly increasing tool life. [0003] Coatings of cutting tools and tools and molds have gone through multiple stages such as TiN and TiAlN, and gradually transformed into CrN and CrAlN coatings to improve the wear resistance of tools and molds. At present, pure chromium or chromium aluminum alloy targets have been developed to prepare this film layer. The CrAlN film is plated on the surface of the material by vacuum sput...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B22F3/04B22F3/14C22C1/04C22C21/00C22C27/06C23C14/14C23C14/34
Inventor 唐培新张凤戈张路长姚伟姜海赵雷高明郝权孙继洲
Owner 北京安泰六九新材料科技有限公司
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