Method for manufacturing manganese zinc ferrite film through sol-gel method
A manganese-zinc ferrite and gel method technology, applied in the application of magnetic film to substrate, liquid application, solid-state chemical plating, etc., can solve the problems of target and film composition deviation, target material waste, etc. The effect of suppressing micro-cracks, improving film quality, and smoothing the surface
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Embodiment 1
[0025] 1. Dilute ferric nitrate and zinc nitrate by Mn 0.5 Zn 0.5 Fe 2 o 4 The stoichiometric ratio is weighed, and the iron nitrate and nitric acid obtained by weighing are dissolved in deionized water, and a yellow transparent solution is obtained through magnetic stirring;
[0026] 2. Use a pipette to measure manganese nitrate solution with a certain stoichiometric ratio and add it to the mixed solution obtained in step 1. Add citric acid as a complexing agent at the same time. The molar ratio of citric acid and manganese nitrate is 2:1. Stir at 60°C until clear;
[0027] 3. Add an appropriate amount of ammonia water to the mixed solution obtained in step 2, adjust the pH value of the mixed solution to 6-7, and obtain a sol, and the concentration of the sol is controlled at 0.1Mol / l. Then add 0.5 g of polyvinylpyrrolidone, and continue to stir at 60°C until clear to obtain a yellow uniform, stable MnZn ferrite sol;
[0028] 4. Clean the silicon wafer with a mixed aqueo...
Embodiment 2
[0038] 1. Dilute ferric nitrate and zinc nitrate by Mn 0.5 Zn 0.5 Fe 2 o 4 The stoichiometric ratio is weighed, and the iron nitrate and nitric acid obtained by weighing are dissolved in deionized water, and magnetically stirred to obtain a yellow transparent solution;
[0039]2. Use a pipette to measure manganese nitrate solution with a certain stoichiometric ratio and add it to the mixed solution obtained in step 1. Add citric acid as a complexing agent at the same time. The molar ratio of citric acid and manganese nitrate is 2:1. Stir at 60°C until clear;
[0040] 3. Add an appropriate amount of ammonia water to the mixed solution obtained in step 2, adjust the pH value of the solution to about 7, and obtain a sol, and the concentration of the sol is controlled at 0.2Mol / l. Then add 0.5 g of polyvinylpyrrolidone, and continue to stir at 60°C until clear to obtain a yellow uniform, stable MnZn ferrite sol;
[0041] 4. Clean the silicon wafer with a mixed aqueous solutio...
Embodiment 3
[0046] 1. Dilute ferric nitrate and zinc nitrate by Mn 0.5 Zn 0.5 Fe 2 o 4 The stoichiometric ratio is weighed, and the iron nitrate and nitric acid obtained by weighing are dissolved in deionized water, and magnetically stirred to obtain a yellow transparent solution;
[0047] 2. Use a pipette to measure manganese nitrate solution with a certain stoichiometric ratio and add it to the mixed solution obtained in step 1. Add citric acid as a complexing agent at the same time. The molar ratio of citric acid and manganese nitrate is 2:1. Stir at 60°C until clear;
[0048] 3. Add an appropriate amount of ammonia water to the mixed solution obtained in step 2, adjust the pH value of the solution to be around 7, and obtain a sol, and the concentration of the sol is controlled at 0.2Mol / l. Then add 0.6 g of polyvinylpyrrolidone, and continue to stir at 60°C until clear to obtain a uniform yellow, stable MnZn ferrite sol;
[0049] 4. Clean the silicon wafer with a mixed aqueous so...
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