Cobalt-containing doped silicon dioxide nano-composite abrasive grain sol and preparation method thereof, and polishing solution and preparation method thereof
A silicon dioxide and nanocomposite technology, applied in the direction of polishing compositions containing abrasives, chemical instruments and methods, and other chemical processes, can solve the problem of increasing the surface roughness of polished substrates, sapphire polishing rate and surface roughness It can not meet the industrial needs and other problems well, and achieve the effect of reducing roughness, reducing wear and reducing surface roughness
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Embodiment 1
[0030] The cobalt-doped silica nanocomposite abrasive sol in this example is prepared by co-precipitation method. The preparation process is as follows: first use the cation exchange method to prepare a pH value of 2.5, and then prepare 2.5 wt% silicic acid and 0.43 wt% Co(NO3)2·6H2O solution in an equal mass ratio under stirring conditions at 100 ℃, and 1 wt % NaOH were added to the silica seed crystals separately. Sodium hydroxide controls the pH value of the whole sol system to remain at 10, and controls the drop rate of the mixture of cobalt nitrate and silicic acid to keep the evaporation rate and drop rate in the sol system in balance. Add dropwise for 140 minutes, 280 minutes, and 420 minutes respectively to prepare cobalt-doped silica nanocomposite abrasive sols with cobalt hydroxide doping amounts of 0.5 wt%, 1.0 wt%, and 1.5 wt%.
Embodiment 2
[0032] The sol with cobalt hydroxide doping amount of 0.5 wt% was diluted to 3 L with deionized water, and the solid content was 10%. The particle size of the composite abrasive particle of cobalt-doped silica is 106 nm, and the final pH value of the sol is 10. After filtering with a 350-mesh sieve, add 1% sodium pyrophosphate as a dispersant and 0.5% lauryl polyoxyethylene ether as a surfactant to obtain a polishing solution.
Embodiment 3
[0034] The sol doped with 1.0 wt% cobalt hydroxide was diluted to 3 L with deionized water, and the solid content was 10%. The composite abrasive particle size of cobalt-doped silica is 110 nanometers, and the final pH value of the sol is 10. After filtering with a 350-mesh sieve, add 1% sodium pyrophosphate as a dispersant and 0.5% lauryl polyoxyethylene ether as a surfactant to obtain a polishing solution.
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