Preparation method of planar lobster-eye focusing lens based on semiconductor technology

Abstract

The invention discloses a preparation method of a planar lobster-eye focusing lens based on semiconductor technology. The preparation method comprises the following steps that an n type Si wafer is polished and ground; a hard mask layer is formed at the upper surface of the Si wafer via an oxidation technology or vapor deposition; a mask layer with a square micro-hole array is formed in the hard mask layer via exposure by utilizing a photoresist technology; the Si wafer is etched by utilizing square micro-holes in the mask layer, and etching induction pits are formed; the hard mask layer is removed, the backside of the Si wafer is plated with a metal electrode layer, and the metal electrode layer is connected with the anode of a power supply; a metal plate electrode is placed at the front side of the Si wafer in certain distance and connected with the cathode of the power supply, an electrolyte exists between the plate electrode and the front side of the Si wafer, the power supply is switched on, and the backside of the Si wafer is illuminated to carry out photoelectric chemical etching; the metal electrode at the backside of the Si wafer is removed to form an initial model of the lobster eyes; and different surfaces of the initial module is plated with metallic reflection layers via vapor. The method is used to prepare the lobster-eye lens.

Description

technical field [0001] The invention relates to a preparation method of a flat lobster eye focusing lens, belonging to the fields of aerospace, optical technology and microelectronics technology. Background technique [0002] Compared with the collimation detection technology, the focusing detection technology has the advantages of large light collecting area, high sensitivity, low background noise, and imaging capability. However, due to the extremely short wavelength of X-rays, the refractive index of almost all media is close to 1, so it is difficult to achieve focusing by traditional means of refraction. At present, X-rays are mostly focused by grazing incidence, and typical grazing incidence optical systems include K-B optical systems, Wolter optical systems, and the like. Although these optical systems have high spatial resolution, they have serious off-axis aberrations, small fields of view, and large weights. The lobster-eye is an optical system that imitates the v...

AI Technical Summary

Problems solved by technology

However, this process has mutual constraints between fiber thermal drawing, hydrogen reduction process, and sheath-core material selection, as well as process technology limitations. It is very difficult to manufacture Angel lobster eye structures with high aspect ratio and large-area square micropore arrays.

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